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- catalog contributor b11476415.
- catalog contributor b11476416.
- catalog contributor b11476417.
- catalog created "c1999.".
- catalog date "1999".
- catalog date "c1999.".
- catalog dateCopyrighted "c1999.".
- catalog description "Includes bibliographical references and index.".
- catalog extent "ix, 246 p. :".
- catalog hasFormat "Materials science of microelectromechanical systems (MEMS) devices.".
- catalog identifier "1558994521".
- catalog isFormatOf "Materials science of microelectromechanical systems (MEMS) devices.".
- catalog isPartOf "Materials Research Society symposia proceedings ; v. 546.".
- catalog isPartOf "Materials Research Society symposium proceedings ; v. 546".
- catalog issued "1999".
- catalog issued "c1999.".
- catalog language "eng".
- catalog publisher "Warrendale, Pa. : Materials Research Society,".
- catalog relation "Materials science of microelectromechanical systems (MEMS) devices.".
- catalog subject "621.381 21".
- catalog subject "Microelectromechanical systems Congresses.".
- catalog subject "Microelectronics Materials Congresses.".
- catalog subject "TK7875 .M38 1999".
- catalog title "Materials science of microelectromechanical systems (MEMS) devices : symposium held December 1-2, 1998, Boston, Massachusetts, U.S.A. / editors, Arthur H. Heuer, S. Joshua Jacobs.".
- catalog type "Conference proceedings. fast".
- catalog type "text".