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- catalog contributor b11560603.
- catalog created "1999.".
- catalog date "1999".
- catalog date "1999.".
- catalog dateCopyrighted "1999.".
- catalog description "Includes bibliographical references.".
- catalog description "Thesis (Ph. D., Committee on Higher Degrees in Chemical Physics)--Harvard University, 1999.".
- catalog extent "xiv, 218 leaves :".
- catalog issued "1999".
- catalog issued "1999.".
- catalog language "eng".
- catalog subject "Chemical vapor deposition.".
- catalog subject "Metallic oxides.".
- catalog subject "Niobium.".
- catalog subject "Thin films.".
- catalog subject "Titanium nitride.".
- catalog title "Chemical vapor deposition of metal oxide, titanium nitride and niobium nitride thin films / a thesis presented by Xinye Liu.".
- catalog type "text".