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- catalog alternative "Extreme ultraviolet, X-ray, and neutron optics and sources".
- catalog contributor b11726137.
- catalog contributor b11726138.
- catalog contributor b11726139.
- catalog created "c1999.".
- catalog date "1999".
- catalog date "c1999.".
- catalog dateCopyrighted "c1999.".
- catalog description "Includes bibliographical references and index.".
- catalog description "Soft x-ray sources -- Soft x-ray optics -- Hard x-ray optics : microbeam, microfocus, and polycapillary optics -- Hard x-ray optics : metrology, crystals, and mirrors -- EUV and x-ray optics keynote presentations -- EUV lithography -- EUV multilayers and gratings -- Neutron sources and optics.".
- catalog extent "x, 394 p. :".
- catalog hasFormat "EUV, X-ray, and neutron optics and sources.".
- catalog identifier "0819432539".
- catalog isFormatOf "EUV, X-ray, and neutron optics and sources.".
- catalog isPartOf "Proceedings of SPIE--the International Society for Optical Engineering ; v. 3767.".
- catalog isPartOf "SPIE proceedings series ; v. 3767".
- catalog issued "1999".
- catalog issued "c1999.".
- catalog language "eng".
- catalog publisher "Bellingham, Wash., USA : SPIE,".
- catalog relation "EUV, X-ray, and neutron optics and sources.".
- catalog subject "Extreme ultraviolet lithography Congresses.".
- catalog subject "Grenz rays Congresses.".
- catalog subject "Ion beam lithography Congresses.".
- catalog subject "Lithography, Electron beam Congresses.".
- catalog subject "Neutron sources Congresses.".
- catalog subject "TA1775 .E88 1999".
- catalog subject "X-ray optics Congresses.".
- catalog tableOfContents "Soft x-ray sources -- Soft x-ray optics -- Hard x-ray optics : microbeam, microfocus, and polycapillary optics -- Hard x-ray optics : metrology, crystals, and mirrors -- EUV and x-ray optics keynote presentations -- EUV lithography -- EUV multilayers and gratings -- Neutron sources and optics.".
- catalog title "EUV, X-ray, and neutron optics and sources : 21-23 July 1999, Denver, Colorado / Carolyn A. MacDonald ... [et al.], chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering.".
- catalog title "Extreme ultraviolet, X-ray, and neutron optics and sources".
- catalog type "Conference proceedings. fast".
- catalog type "text".