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- catalog abstract ""This book provides expert and comprehensive coverage of current technologies used in the manufacture of VLSI circuits, for process integration up to the Gigabit memory level. It is aimed at advanced students, and also at engineers and scientists working in research, development and production."--Jacket.".
- catalog alternative "Technologie hochintegrierter Schaltungen. English".
- catalog contributor b11815413.
- catalog contributor b11815414.
- catalog contributor b11815415.
- catalog created "c2000.".
- catalog date "2000".
- catalog date "c2000.".
- catalog dateCopyrighted "c2000.".
- catalog description ""This book provides expert and comprehensive coverage of current technologies used in the manufacture of VLSI circuits, for process integration up to the Gigabit memory level. It is aimed at advanced students, and also at engineers and scientists working in research, development and production."--Jacket.".
- catalog description "1. Introduction -- 2. Basic principles of integrated circuits technology -- 3. Film technology -- 4. Lithography -- 5. Etching technology -- 6. Doping technology -- 7. Cleaning technology -- 8. Process integration.".
- catalog description "Includes bibliographical references (p. [323]-328) and index.".
- catalog extent "xvii, 340 p. :".
- catalog identifier "3540661999 (hc. : alk. paper)".
- catalog isPartOf "Springer series in advanced microelectronics, 1437-0387 ; 2".
- catalog issued "2000".
- catalog issued "c2000.".
- catalog language "eng ger".
- catalog language "eng".
- catalog publisher "Berlin ; New York : Springer,".
- catalog subject "621.815 21".
- catalog subject "Digital integrated circuits Design and construction.".
- catalog subject "Metal oxide semiconductors, Complementary.".
- catalog subject "TK7874.65 .W5313 2000".
- catalog tableOfContents "1. Introduction -- 2. Basic principles of integrated circuits technology -- 3. Film technology -- 4. Lithography -- 5. Etching technology -- 6. Doping technology -- 7. Cleaning technology -- 8. Process integration.".
- catalog title "Technologie hochintegrierter Schaltungen. English".
- catalog title "Technology of integrated circuits / D. Widmann, H. Mader, H. Friedrich.".
- catalog type "text".