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- catalog contributor b11827816.
- catalog contributor b11827817.
- catalog created "1998.".
- catalog date "1998".
- catalog date "1998.".
- catalog dateCopyrighted "1998.".
- catalog description "Includes bibliographical references.".
- catalog extent "xiii, 405 p. :".
- catalog identifier "052159054X (hb)".
- catalog isPartOf "Cambridge studies in semiconductor physics and microelectronic engineering ; 7".
- catalog issued "1998".
- catalog issued "1998.".
- catalog language "eng".
- catalog publisher "Cambridge, [England] ; New York : Cambridge University Press,".
- catalog subject "621.3815 21".
- catalog subject "Etching.".
- catalog subject "Micromachining.".
- catalog subject "Silicon.".
- catalog subject "TK7871.15.S55 E49 1998".
- catalog title "Silicon micromachining / M. Elwenspoek and H.V. Jansen.".
- catalog type "text".