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catalog contributor b11859539.
catalog created "c2000.".
catalog date "2000".
catalog date "c2000.".
catalog dateCopyrighted "c2000.".
catalog description "A.M. Fitzgerald, R.H. Dauskardt, T.W. Kenny 43 -- Properties of Low Residual Stress Silicon Oxynitrides Used as a Sacrificial Layer / S. Habermehl, A.K. Glenzinski, W.M. Halliburton, J.J. Sniegowski 49 -- New Materials and Processes for Mems -- New Materials and New Processes for MEMS Applications / J.-A. Schweitz, K. Larsson, G. Thornell, H. Bjorkman, F. Nikolajeff 57 -- Two- and Three-Dimensional Ultrananocrystalline Diamond (UNCD) Structures for a High Resolution Diamond-Based MEMS Technology / O. Auciello, A.R. Krauss, D.M. Gruen, E.M. Meyer, H.G. Busmann, J. Tucek, A. Sumant, A. Jayatissa, N. Moldovan, D.C. Mancini, M.N. Gardos 73 -- Maskless Patterning and Structuring on Ultra-Hard Film Materials / J.K. Park, V.M. Ayres, J. Asmussen, K. Mukherjee 79 -- Inlayed "Atom"-like Three-Dimensional Photonic Crystal Structures Created with Femtosecond Laser Microfabrication /".
catalog description "Deposition and Characterization of Si -- Built-In Strain in Polysilicon: Measurement and Application to Sensor Fabrication / H. Guckel 3 -- Microinstrument for the Characterization of Submicron Silicon Fibers at High Strain / J.M. Chen, B.W. Reed, N.C. MacDonald 13 -- Testing of Critical Features of Polysilicon MEMS / D.A. LaVan, T.E. Buchheit 19 -- Wafer-Level Strength and Fracture Toughness Testing of Surface-Micromachined MEMS Devices / H. Kahn, N. Tayebi, R. Ballarini, R.L. Mullen, A.H. Heuer 25 -- Deposition and Characterization of In Situ Boron Doped Polycrystalline Silicon Films for Microelectromechanical Systems Applications / J.J. McMahon, J.M. Melzak, C.A. Zorman, J. Chung, M. Mehregany 31 -- Control of Residual Stresses in As-Grown Polysilicon by Multi-Layer Deposition: The "Multipoly" Process / Jie Yang, H. Kahn, A.Q. He, S.M. Phillips, A.H. Heuer 37 -- High-Resolution Measurement of Crack Growth in Micro-Machined Crystal Silicon /".
catalog description "E. Zakar, M. Dubey, R. Polcawich, B. Piekarski, R. Piekarz, J. Conrad, R. Widuta 287 -- Etch Rate Variations of p[superscript +] Silicon Wafers in Aqueous KOH Solutions as a Function of Processing Conditions / P. Kilpinen, E. Maimi, V.K. Lindroos 293 -- Defining Conditions for the Etching of Silicon in an Inductive Coupled Plasma Reactor / H. Ashraf, J.K. Bhardwaj, E. Guibarra, S. Hall, J. Hopkins, A.M. Hynes, I. Johnston, L. Lea, S. McCauley, G. Nicholls, P. O'Brien 299 -- Roughness Characterization of Si(110) Etched in TMAH by Atomic Force Microscopy / Z. Moktadir, K. Sato, A. Matsumuro, K. Kayukawa, M. Shikida 305.".
catalog description "Hong-Bo Sun, Ying Xu, Kai Sun, Saulius Juodkazis, Mitsuru Watanabe, Shigeki Matsuo, Hiroaki Misawa, Junji Nishii 85 -- SU-8 Processing on a Variety of Substrates / Yuh-Min Chiang, Mark Bachman, Hung-Pin Chang, Charles Chu, G.P. Li 91 -- Characterization of Metallized Plastic MEMS / Charles Chu, Mark Bachman, Yuh-Min Chiang, Fernando Gonzales, G.P. Li 97 -- Tribology -- Suppression of Stiction in MEMS / C.H. Mastrangelo 105 -- Investigation of Wear of Microelectromechanical Contacts / Brian J. Gally, C. Cameron Abnet, Stuart Brown 117 -- Investigation of the Deposition and Integration of Hard Coatings for Moving MEMS Applications / P.M. Adams, R.E. Robertson, R.C. Cole, D. Hinkley, G. Radhakrishnan 123 -- Friction Measurement in MEMS Using a New Test Structure / B.T. Crozier, M.P. de Boer, J.M. Redmond, D.F. Bahr, T.A. Michalske 129 -- Selective W for Coating and Releasing MEMS Devices /".
catalog description "Includes bibliographical references and index.".
catalog description "MEMS Material Microstructure and Elastic Property Modeling / Howard R. Last, Kevin J. Hemker, Ronald Witt 191 -- Effect of As-Processed and Annealed Microstructures on the Mechanical Properties of LIGA Ni MEMS / Z.L. Xie, D. Pan, H. Last, K.J. Hemker 197 --l Materials Aspects, Modeling and Characterization of MEMS Devices and Test Structures -- Torsional Micromirror Array Design for Optical Binary Switching and Amplitude Modulation Applications / E.S. Kolesar, P.B. Allen, N.C. Boydston, J.T. Howard, S.Y. Ko, J.W. Wilken 205 -- Micromachined Polysilicon Resonating Xylophone Bar Magnetometer: Resonance Characteristics / J.L. Lamb, D.K. Wickenden, J.L. Champion, R.B. Givens, R. Osiander, T.J. Kistenmacher 211 -- Development of a MEMS Xylophone Bar Magnetometer Using Optical Interferometry for Detection / Joseph Miragliotta, R. Osiander, J.L. Champion, D.A. Oursler, T.J. Kistenmacher 217 --".
catalog description "S.S. Mani, J.G. Fleming, J.J. Sniegowski, M.P. de Boer, L.W. Irwin, J.A. Walraven, D.M. Tanner, D.A. LaVan 135 -- A Novel Integrated MEMS Process Using Fluorocarbon Films Deposited With a Deep Reactive Ion Etching (DRIE) Tool / A.A. Ayon, D-Z. Chen, R. Khanna, R. Braff, H.H. Sawin, M.A. Schmidt 141 -- Dynamic Optical Characterization -- Computer Microvision for MEMS / Dennis M. Freeman 151 -- Dynamics of MEMS Microengines Using Optoelectronic Laser Interferometry / G.C. Brown, R.J. Pryputniewicz, M.P. de Boer, Norman Smith 163 -- Packaging -- Characterization of Low Temperature, Wafer-Level Gold-Gold Thermocompression Bonds / Christine H. Tsau, Martin A. Schmidt, S. Mark Spearing 171 -- Packaging MEM Sensor Arrays / T.F. Marinis, D.A. Fulginiti, H.G. Clausen 177 -- Fluxless Microjoining by Au-In-Ni Isothermal Solidification / M. Waelti, N. Schneeberger, O. Brand, H. Baltes 183 -- Liga --".
catalog description "Static and Dynamic Characterization of Buckled Composite SiO[subscript 2]-Au Microbridges / L. Nicu, C. Gergaud, A. Martinez, P. Temple-Boyer 223 -- Mechanical Property Measurement of Electroplated Gold Microstructure Using Resonance Method / Chang-Wook Baek, Yong-Kweon Kim, Yoo-Min Ahn 229 -- Temperature-Dependent Coefficient of Thermal Expansion of Silicon Nitride Films Used in Microelectromechanical Systems / Melissa Bargmann, Amy Kumpel, Haruna Tada, Patricia Nieva, Paul Zavracky, Ioannis N. Miaoulis, Peter Y. Wong 235 -- Fatigue Testing Machine of Micro-Sized Specimens for MEMS Applications / Y. Higo, K. Takashima, M. Shimojo, S. Sugiura, B. Pfister, M.V. Swain 241 -- Fatigue Properties for Micro-Sized Ni-P Amorphous Alloy Specimens / S. Maekawa, K. Takashima, M. Shimojo, Y. Higo, M.V. Swain 247 -- Test Channels for Flow Characterization of Processed Plastic Microchannels /".
catalog description "Yandong Chen, Zhongping Chen, Yonghua Zhao, J. Stuart Nelson, Mark Bachman, Yuh-Min Chiang, Charles Chu, G.P. Li 253 -- X-ray Microprobe Studies of Materials Problems Related to Microelectromechanical Systems (MEMS) Structures / N. Molders, P.J. Schilling, J. Gottert, H.O. Moser, V. Saile 261 -- Effect of Buffer Electrodes in Crystallization of Zinc Oxide Thin Film for Thin Film Bulk Acoustic Wave Resonator / Y. Yoshino, N. Tsukai, K. Inoue, M. Takeuchi, T. Nomura, T. Makino, S. Arai, T. Hata 267 -- Fracture Behavior of Micro-Sized Ni-P Amorphous Alloy Specimens / Y. Ichikawa, S. Maekawa, K. Takashima, M. Shimojo, Y. Higo, M.V. Swain 273 -- Characterization of Mems Processing -- Porous Silicon as a Sacrificial Material for Microstructures Fabrication / M. Morel, M. Le Berre, V. Lysenko, G. Delhomme, A. Dittmar, D. Barbier 281 -- Study of PZT Film Stress in Multilayer Structures for MEMS Devices /".
catalog extent "xiii, 314 p. :".
catalog hasFormat "Materials science of microelectromechanical systems (MEMS) devices II.".
catalog identifier "1558995137".
catalog isFormatOf "Materials science of microelectromechanical systems (MEMS) devices II.".
catalog isPartOf "Materials Research Society symposia proceedings ; v. 605.".
catalog isPartOf "Materials Research Society symposium proceedings ; v. 605".
catalog issued "2000".
catalog issued "c2000.".
catalog language "eng".
catalog publisher "Warrendale, Pa. : Materials Research Society,".
catalog relation "Materials science of microelectromechanical systems (MEMS) devices II.".
catalog subject "621.381 21".
catalog subject "Microactuators Materials Congresses.".
catalog subject "Microelectromechanical systems Congresses.".
catalog subject "Microelectronics Materials Congresses.".
catalog subject "TA7875 .M38 2000".
catalog tableOfContents "A.M. Fitzgerald, R.H. Dauskardt, T.W. Kenny 43 -- Properties of Low Residual Stress Silicon Oxynitrides Used as a Sacrificial Layer / S. Habermehl, A.K. Glenzinski, W.M. Halliburton, J.J. Sniegowski 49 -- New Materials and Processes for Mems -- New Materials and New Processes for MEMS Applications / J.-A. Schweitz, K. Larsson, G. Thornell, H. Bjorkman, F. Nikolajeff 57 -- Two- and Three-Dimensional Ultrananocrystalline Diamond (UNCD) Structures for a High Resolution Diamond-Based MEMS Technology / O. Auciello, A.R. Krauss, D.M. Gruen, E.M. Meyer, H.G. Busmann, J. Tucek, A. Sumant, A. Jayatissa, N. Moldovan, D.C. Mancini, M.N. Gardos 73 -- Maskless Patterning and Structuring on Ultra-Hard Film Materials / J.K. Park, V.M. Ayres, J. Asmussen, K. Mukherjee 79 -- Inlayed "Atom"-like Three-Dimensional Photonic Crystal Structures Created with Femtosecond Laser Microfabrication /".
catalog tableOfContents "Deposition and Characterization of Si -- Built-In Strain in Polysilicon: Measurement and Application to Sensor Fabrication / H. Guckel 3 -- Microinstrument for the Characterization of Submicron Silicon Fibers at High Strain / J.M. Chen, B.W. Reed, N.C. MacDonald 13 -- Testing of Critical Features of Polysilicon MEMS / D.A. LaVan, T.E. Buchheit 19 -- Wafer-Level Strength and Fracture Toughness Testing of Surface-Micromachined MEMS Devices / H. Kahn, N. Tayebi, R. Ballarini, R.L. Mullen, A.H. Heuer 25 -- Deposition and Characterization of In Situ Boron Doped Polycrystalline Silicon Films for Microelectromechanical Systems Applications / J.J. McMahon, J.M. Melzak, C.A. Zorman, J. Chung, M. Mehregany 31 -- Control of Residual Stresses in As-Grown Polysilicon by Multi-Layer Deposition: The "Multipoly" Process / Jie Yang, H. Kahn, A.Q. He, S.M. Phillips, A.H. Heuer 37 -- High-Resolution Measurement of Crack Growth in Micro-Machined Crystal Silicon /".
catalog tableOfContents "E. Zakar, M. Dubey, R. Polcawich, B. Piekarski, R. Piekarz, J. Conrad, R. Widuta 287 -- Etch Rate Variations of p[superscript +] Silicon Wafers in Aqueous KOH Solutions as a Function of Processing Conditions / P. Kilpinen, E. Maimi, V.K. Lindroos 293 -- Defining Conditions for the Etching of Silicon in an Inductive Coupled Plasma Reactor / H. Ashraf, J.K. Bhardwaj, E. Guibarra, S. Hall, J. Hopkins, A.M. Hynes, I. Johnston, L. Lea, S. McCauley, G. Nicholls, P. O'Brien 299 -- Roughness Characterization of Si(110) Etched in TMAH by Atomic Force Microscopy / Z. Moktadir, K. Sato, A. Matsumuro, K. Kayukawa, M. Shikida 305.".
catalog tableOfContents "Hong-Bo Sun, Ying Xu, Kai Sun, Saulius Juodkazis, Mitsuru Watanabe, Shigeki Matsuo, Hiroaki Misawa, Junji Nishii 85 -- SU-8 Processing on a Variety of Substrates / Yuh-Min Chiang, Mark Bachman, Hung-Pin Chang, Charles Chu, G.P. Li 91 -- Characterization of Metallized Plastic MEMS / Charles Chu, Mark Bachman, Yuh-Min Chiang, Fernando Gonzales, G.P. Li 97 -- Tribology -- Suppression of Stiction in MEMS / C.H. Mastrangelo 105 -- Investigation of Wear of Microelectromechanical Contacts / Brian J. Gally, C. Cameron Abnet, Stuart Brown 117 -- Investigation of the Deposition and Integration of Hard Coatings for Moving MEMS Applications / P.M. Adams, R.E. Robertson, R.C. Cole, D. Hinkley, G. Radhakrishnan 123 -- Friction Measurement in MEMS Using a New Test Structure / B.T. Crozier, M.P. de Boer, J.M. Redmond, D.F. Bahr, T.A. Michalske 129 -- Selective W for Coating and Releasing MEMS Devices /".
catalog tableOfContents "MEMS Material Microstructure and Elastic Property Modeling / Howard R. Last, Kevin J. Hemker, Ronald Witt 191 -- Effect of As-Processed and Annealed Microstructures on the Mechanical Properties of LIGA Ni MEMS / Z.L. Xie, D. Pan, H. Last, K.J. Hemker 197 --l Materials Aspects, Modeling and Characterization of MEMS Devices and Test Structures -- Torsional Micromirror Array Design for Optical Binary Switching and Amplitude Modulation Applications / E.S. Kolesar, P.B. Allen, N.C. Boydston, J.T. Howard, S.Y. Ko, J.W. Wilken 205 -- Micromachined Polysilicon Resonating Xylophone Bar Magnetometer: Resonance Characteristics / J.L. Lamb, D.K. Wickenden, J.L. Champion, R.B. Givens, R. Osiander, T.J. Kistenmacher 211 -- Development of a MEMS Xylophone Bar Magnetometer Using Optical Interferometry for Detection / Joseph Miragliotta, R. Osiander, J.L. Champion, D.A. Oursler, T.J. Kistenmacher 217 --".
catalog tableOfContents "S.S. Mani, J.G. Fleming, J.J. Sniegowski, M.P. de Boer, L.W. Irwin, J.A. Walraven, D.M. Tanner, D.A. LaVan 135 -- A Novel Integrated MEMS Process Using Fluorocarbon Films Deposited With a Deep Reactive Ion Etching (DRIE) Tool / A.A. Ayon, D-Z. Chen, R. Khanna, R. Braff, H.H. Sawin, M.A. Schmidt 141 -- Dynamic Optical Characterization -- Computer Microvision for MEMS / Dennis M. Freeman 151 -- Dynamics of MEMS Microengines Using Optoelectronic Laser Interferometry / G.C. Brown, R.J. Pryputniewicz, M.P. de Boer, Norman Smith 163 -- Packaging -- Characterization of Low Temperature, Wafer-Level Gold-Gold Thermocompression Bonds / Christine H. Tsau, Martin A. Schmidt, S. Mark Spearing 171 -- Packaging MEM Sensor Arrays / T.F. Marinis, D.A. Fulginiti, H.G. Clausen 177 -- Fluxless Microjoining by Au-In-Ni Isothermal Solidification / M. Waelti, N. Schneeberger, O. Brand, H. Baltes 183 -- Liga --".
catalog tableOfContents "Static and Dynamic Characterization of Buckled Composite SiO[subscript 2]-Au Microbridges / L. Nicu, C. Gergaud, A. Martinez, P. Temple-Boyer 223 -- Mechanical Property Measurement of Electroplated Gold Microstructure Using Resonance Method / Chang-Wook Baek, Yong-Kweon Kim, Yoo-Min Ahn 229 -- Temperature-Dependent Coefficient of Thermal Expansion of Silicon Nitride Films Used in Microelectromechanical Systems / Melissa Bargmann, Amy Kumpel, Haruna Tada, Patricia Nieva, Paul Zavracky, Ioannis N. Miaoulis, Peter Y. Wong 235 -- Fatigue Testing Machine of Micro-Sized Specimens for MEMS Applications / Y. Higo, K. Takashima, M. Shimojo, S. Sugiura, B. Pfister, M.V. Swain 241 -- Fatigue Properties for Micro-Sized Ni-P Amorphous Alloy Specimens / S. Maekawa, K. Takashima, M. Shimojo, Y. Higo, M.V. Swain 247 -- Test Channels for Flow Characterization of Processed Plastic Microchannels /".
catalog tableOfContents "Yandong Chen, Zhongping Chen, Yonghua Zhao, J. Stuart Nelson, Mark Bachman, Yuh-Min Chiang, Charles Chu, G.P. Li 253 -- X-ray Microprobe Studies of Materials Problems Related to Microelectromechanical Systems (MEMS) Structures / N. Molders, P.J. Schilling, J. Gottert, H.O. Moser, V. Saile 261 -- Effect of Buffer Electrodes in Crystallization of Zinc Oxide Thin Film for Thin Film Bulk Acoustic Wave Resonator / Y. Yoshino, N. Tsukai, K. Inoue, M. Takeuchi, T. Nomura, T. Makino, S. Arai, T. Hata 267 -- Fracture Behavior of Micro-Sized Ni-P Amorphous Alloy Specimens / Y. Ichikawa, S. Maekawa, K. Takashima, M. Shimojo, Y. Higo, M.V. Swain 273 -- Characterization of Mems Processing -- Porous Silicon as a Sacrificial Material for Microstructures Fabrication / M. Morel, M. Le Berre, V. Lysenko, G. Delhomme, A. Dittmar, D. Barbier 281 -- Study of PZT Film Stress in Multilayer Structures for MEMS Devices /".
catalog title "Materials science of microelectromechanical systems (MEMS) devices II : symposium held November 29-December 1, 1999, Boston, Massachusetts, U.S.A. / editors, Maarten P. de Boer ... [et al.].".
catalog type "Boston (Mass., 1999) swd".
catalog type "text".