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- catalog alternative "Smart electronics and MEMS".
- catalog contributor b12009950.
- catalog contributor b12009951.
- catalog contributor b12009952.
- catalog contributor b12009953.
- catalog contributor b12009954.
- catalog contributor b12009955.
- catalog created "c2000.".
- catalog date "2000".
- catalog date "c2000.".
- catalog dateCopyrighted "c2000.".
- catalog description "Includes bibliographic references and index.".
- catalog extent "viii, 390 p. :".
- catalog identifier "0819436089".
- catalog isPartOf "Proceedings of SPIE ; v. 3990".
- catalog isPartOf "Proceedings of SPIE--the International Society for Optical Engineering ; v. 3990.".
- catalog issued "2000".
- catalog issued "c2000.".
- catalog language "eng".
- catalog publisher "Bellingham, Wash., USA : SPIE--the International Society for Optical Engineering,".
- catalog subject "Actuators Congresses.".
- catalog subject "Microelectromechanical systems Congresses.".
- catalog subject "Microelectronics Materials Congresses.".
- catalog subject "Smart materials Congresses.".
- catalog subject "TA418.9.S62 S52995 2000".
- catalog title "Smart electronics and MEMS".
- catalog title "Smart structures and materials 2000. Smart electronics and MEMS : 6-8 March 2000, Newport Beach, USA / Vijay K. Varadan, chair/editor ; sponsored by SPIE--the International Society for Optical Engineering ; cosponsored by SEM--Society for Experimental Mechanics ... [et al.] ; cooperating organizations, Air Force Research Laboratory (USA), the Ceramic Society of Japan, Intelligent Materials Forum (Japan).".
- catalog type "text".