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- catalog contributor b12097883.
- catalog created "2001.".
- catalog date "2001".
- catalog date "2001.".
- catalog dateCopyrighted "2001.".
- catalog description "Includes bibliographical references and index.".
- catalog extent "xv, various paginations :".
- catalog hasFormat "Si front-end processing.".
- catalog identifier "1558995188".
- catalog isFormatOf "Si front-end processing.".
- catalog isPartOf "Materials Research Society symposia proceedings ; v 568.".
- catalog isPartOf "Materials Research Society symposium proceedings ; v. 610".
- catalog issued "2001".
- catalog issued "2001.".
- catalog language "eng".
- catalog publisher "Warrendale, Pa. : Materials Research Society,".
- catalog relation "Si front-end processing.".
- catalog subject "621.3815/2 21".
- catalog subject "Semiconductor doping Congresses.".
- catalog subject "Semiconductors Defects Congresses.".
- catalog subject "Semiconductors Design and construction Congresses.".
- catalog subject "Silicon Congresses.".
- catalog subject "TK7871.85 S536 2001".
- catalog title "Si front-end processing : physics and technology of dopant-defect interactions II : symposium held April 24-27, 2000, San Francisco, California, USA / editors, Aditya Agarwal ... [et al.].".
- catalog type "Conference proceedings. fast".
- catalog type "San Francisco (Calif., 2000) swd".
- catalog type "text".