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- catalog contributor b12193820.
- catalog created "2001.".
- catalog date "2001".
- catalog date "2001.".
- catalog dateCopyrighted "2001.".
- catalog description "Includes bibliographical references and index.".
- catalog extent "1 v. (various paging) :".
- catalog identifier "1558995463".
- catalog isPartOf "Materials Research Society symposia proceedings ; v. 636.".
- catalog isPartOf "Materials Research Society symposium proceedings ; v. 636".
- catalog issued "2001".
- catalog issued "2001.".
- catalog language "eng".
- catalog publisher "Warrendale, Pa. : Materials Research Soceity,".
- catalog subject "621.3815 21".
- catalog subject "Integrated circuits Design and construction Congresses.".
- catalog subject "Microlithography Congresses.".
- catalog subject "Molecular electronics Congresses.".
- catalog subject "Nanotechnology Congresses.".
- catalog subject "Photonics Congresses.".
- catalog subject "TK7874 .N635 2001".
- catalog title "Nonlithographic and lithographic methods of nanofabrication--from ultralarge-scale integration to photonics to molecular electronics : symposium held November 26-December 1, 2000, Boston, Massachusetts, U.S.A. / editors: Lhadi Merhari ... [et al.].".
- catalog type "text".