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- catalog contributor b12195151.
- catalog contributor b12195152.
- catalog contributor b12195153.
- catalog created "c2000.".
- catalog date "2000".
- catalog date "c2000.".
- catalog dateCopyrighted "c2000.".
- catalog description "Includes bibliographical references and index.".
- catalog extent "vii, 178 p. :".
- catalog identifier "0819437913".
- catalog isPartOf "Proceedings of SPIE--the International Society for Optical Engineering ; v. 4146.".
- catalog isPartOf "SPIE proceedings series ; v. 4146".
- catalog issued "2000".
- catalog issued "c2000.".
- catalog language "eng".
- catalog publisher "Bellingham, Wash., USA : SPIE,".
- catalog subject "Grenz rays Congresses.".
- catalog subject "TA1775 .S62 2000".
- catalog subject "Ultraviolet radiation Industrial applications Congresses.".
- catalog subject "X-ray optics Congresses.".
- catalog subject "X-rays Industrial applications Congresses.".
- catalog title "Soft X-ray and EUV imaging systems : 3-4 August 2000, San Diego, USA / Winfried M. Kaiser, Richard H. Stulen, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering.".
- catalog type "text".