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- catalog contributor b12203883.
- catalog created "2001.".
- catalog date "2001".
- catalog date "2001.".
- catalog dateCopyrighted "2001.".
- catalog description "Includes bibliographical references.".
- catalog description "Thesis (Ph.D., Department of Chemistry)--Harvard University, 2001.".
- catalog extent "xx, 272 leaves :".
- catalog issued "2001".
- catalog issued "2001.".
- catalog language "eng".
- catalog subject "Microfabrication.".
- catalog subject "Microlithography.".
- catalog subject "Molding (Chemical technology)".
- catalog title "Fabrication of functional devices using soft lithography and uncovering micropatterning / by Tao Deng.".
- catalog type "text".