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- catalog contributor b12235397.
- catalog created "c2001.".
- catalog date "2001".
- catalog date "c2001.".
- catalog dateCopyrighted "c2001.".
- catalog description "Includes bibliographical references and index.".
- catalog extent "1 v. (various pagination), [16] p. of plates :".
- catalog identifier "0849300770 (alk. paper)".
- catalog isPartOf "Mechanical engineering handbook series".
- catalog issued "2001".
- catalog issued "c2001.".
- catalog language "eng".
- catalog publisher "Boca Raton, Fla : CRC Press,".
- catalog subject "621 21".
- catalog subject "Mechanical engineering Handbooks, manuals, etc.".
- catalog subject "TJ151 .M46 2001".
- catalog title "The MEMS handbook / edited by Mohamed Gad-el-Hak.".
- catalog type "text".