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- catalog alternative "Smart electronics and MEMS".
- catalog contributor b12244632.
- catalog contributor b12244633.
- catalog contributor b12244634.
- catalog contributor b12244635.
- catalog created "c2001.".
- catalog date "2001".
- catalog date "c2001.".
- catalog dateCopyrighted "c2001.".
- catalog description "Includes bibliographic references and index.".
- catalog extent "viii, 392 p. :".
- catalog identifier "0819440205".
- catalog isPartOf "Proceedings of SPIE--the International Society for Optical Engineering ; v. 4334.".
- catalog isPartOf "SPIE proceedings series ; v. 4334".
- catalog issued "2001".
- catalog issued "c2001.".
- catalog language "eng".
- catalog publisher "Bellingham, Washington : SPIE,".
- catalog subject "Actuators Congresses.".
- catalog subject "Microelectromechanical systems Congresses.".
- catalog subject "Microelectronics Materials Congresses.".
- catalog subject "Smart materials Congresses.".
- catalog subject "TA418.9.S62 S4325 2001".
- catalog title "Smart electronics and MEMS".
- catalog title "Smart structures and materials 2001. Smart electronics and MEMS : 5-7 March, 2001, Newport Beach, USA / Vijay K. Varadan, chair/editor ; sponsored by SPIE--the International Society for Optical Engineering ; cosponsored by ASME--American Society for Mechanical Engineers ... [et al.] ; cooperating organizations, Air Force Research Laboratory, DARP--Defense Advanced Research Projects Agency (USA), [and] the Ceramic Society of Japan.".
- catalog type "text".