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- catalog contributor b12286595.
- catalog created "c2001.".
- catalog date "2001".
- catalog date "c2001.".
- catalog dateCopyrighted "c2001.".
- catalog description "Includes bibliographical references and indexes.".
- catalog extent "1 v. (various pagings) :".
- catalog identifier "1558995676".
- catalog isPartOf "Materials Research Society symposia proceedings ; v. 657.".
- catalog isPartOf "Materials Research Society symposium proceedings ; v. 657".
- catalog issued "2001".
- catalog issued "c2001.".
- catalog language "eng".
- catalog publisher "Warrendale, Pa. : Materials Research Society,".
- catalog subject "621.381 21".
- catalog subject "Microelectromechanical systems Materials Congresses.".
- catalog subject "TK7875 .M38 2001".
- catalog title "Materials science of microelectromechanical systems (MEMS) devices III : symposium held November 27-28, 2000, Boston, Massachusetts, U.S.A. / editors, Harold Kahn ... [et al.].".
- catalog type "text".