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- catalog accrualPolicy "Bimonthly".
- catalog alternative "J. vac. sci. technol., B, Microelectron. nanometer struct.".
- catalog alternative "JVST B 1994-".
- catalog alternative "Journal of vacuum science & technology. B, Microelectronics and nanometer structures (Online) wid".
- catalog alternative "Journal of vacuum science and technology. B, Microelectronics and nanometer structures".
- catalog alternative "Microelectronics and nanometer structures".
- catalog alternative "Vols. for <2003>-2010 have title: Journal of vacuum science & technology. B, International journal devoted to microelectronics and nanometer structures : processing, measurement, and phenomena".
- catalog contributor b12332860.
- catalog contributor b12332861.
- catalog created "c1991-c2010.".
- catalog date "1991".
- catalog date "c1991-c2010.".
- catalog dateCopyrighted "c1991-c2010.".
- catalog description "Chemical abstracts 0009-2258".
- catalog description "Includes an issue: U.S. Workshop on the Physics and Chemistry of Mercury Cadmium Telluride and Related II-VI Compounds. Proceedings of the ... U.S. Workshop on the Physics and Chemistry of Mercury Cadmium Telluride and Related II-VI Compounds.".
- catalog description "Includes as the Nov./Dec. issue, 1993- : International Symposium on Electron, Ion, and Photon Beams. Papers from the ... International Symposium on Electron, Ion, and Photon Beams; as the Nov./Dec. issue, <1998->: International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication. Papers from the ... International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication, also published separately.".
- catalog description "Includes: Molecular Beam Epitaxy Workshop. Proceedings of the ... Molecular Beam Epitaxy Workshop, and: North American Conference on Molecular Beam Epitaxy. Papers from the ... North American Conference on Molecular Beam Epitaxy, also published separately.".
- catalog extent "v. :".
- catalog hasFormat "Journal of vacuum science & technology. B, Microelectronics and nanometer structures (Online)".
- catalog identifier "1071-1023".
- catalog isFormatOf "Journal of vacuum science & technology. B, Microelectronics and nanometer structures (Online)".
- catalog isReferencedBy "Chemical abstracts 0009-2258".
- catalog isReplacedBy "Journal of vacuum science and technology. B, Nanotechnology & microelectronics".
- catalog issued "1991".
- catalog issued "c1991-c2010.".
- catalog language "eng".
- catalog publisher "New York : Published for the Society by the American Institute of Physics,".
- catalog relation "JVST. A & B".
- catalog relation "Journal of vacuum science & technology. B, Microelectronics and nanometer structures (Online)".
- catalog relation "Journal of vacuum science & technology. B, Microelectronics processing and phenomena".
- catalog relation "Journal of vacuum science and technology. B, Nanotechnology & microelectronics".
- catalog relation "Papers from the ... International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication".
- catalog relation "Papers from the ... International Symposium on Electron, Ion, and Photon Beams".
- catalog relation "Papers from the ... North American Conference on Molecular Beam Epitaxy".
- catalog relation "Proceedings of the ... International Vacuum Microelectronics Conference".
- catalog relation "Proceedings of the ... Molecular Beam Epitaxy Workshop".
- catalog relation "Proceedings of the ... U.S. Workshop on the Physics and Chemistry of Mercury Cadmium Telluride and Related II-VI Compounds".
- catalog replaces "Journal of vacuum science & technology. B, Microelectronics processing and phenomena".
- catalog subject "621.381/05 20".
- catalog subject "Matériaux nanocristallins Périodiques.".
- catalog subject "Microelectronics Periodicals.".
- catalog subject "Microélectronique Périodiques.".
- catalog subject "Nanoparticles Measurement Periodicals.".
- catalog subject "Nanostructured materials Periodicals.".
- catalog subject "T1 .J754".
- catalog subject "TJ940 .J669".
- catalog subject "Vacuum microelectronics Periodicals.".
- catalog subject "Vide (Technologie) Périodiques.".
- catalog title "J. vac. sci. technol., B, Microelectron. nanometer struct.".
- catalog title "JVST B 1994-".
- catalog title "Journal of vacuum science & technology. B, Microelectronics and nanometer structures : processing, measurement, and phenomena : an official journal of the American Vacuum Society.".
- catalog title "Journal of vacuum science & technology. B, Microelectronics and nanometer structures".
- catalog title "Journal of vacuum science and technology. B, Microelectronics and nanometer structures".
- catalog title "Microelectronics and nanometer structures".
- catalog title "Vols. for <2003>-2010 have title: Journal of vacuum science & technology. B, International journal devoted to microelectronics and nanometer structures : processing, measurement, and phenomena".
- catalog type "text".