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- catalog contributor b12433876.
- catalog contributor b12433877.
- catalog created "c2001.".
- catalog date "2001".
- catalog date "c2001.".
- catalog dateCopyrighted "c2001.".
- catalog description "Includes bibliographic references and indexes.".
- catalog extent "1 v. (various pagings) :".
- catalog hasFormat "Si front-end processing.".
- catalog identifier "1558996052".
- catalog isFormatOf "Si front-end processing.".
- catalog isPartOf "Materials Research Society symposia proceedings ; v 669.".
- catalog isPartOf "Materials Research Society symposium proceedings ; v. 669".
- catalog issued "2001".
- catalog issued "c2001.".
- catalog language "eng".
- catalog publisher "Warrendale, Pa. : Materials Research Society,".
- catalog relation "Si front-end processing.".
- catalog subject "Semiconductor doping Congresses.".
- catalog subject "Semiconductors Defects Congresses.".
- catalog subject "Semiconductors Design and construction Congresses.".
- catalog subject "Silicon Congresses.".
- catalog subject "TK7871.85 .S5363 2001".
- catalog title "Si front-end processing : physics and technology of dopant-defect interactions III : symposium held April 17-19, 2001, San Francisco, California, U.S.A. / editors, Erin C. Jones ... [et al.].".
- catalog type "Conference proceedings. fast".
- catalog type "San Francisco (Calif., 2001) swd".
- catalog type "text".