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- catalog contributor b12553623.
- catalog contributor b12553624.
- catalog contributor b12553625.
- catalog created "c2001.".
- catalog date "2001".
- catalog date "c2001.".
- catalog dateCopyrighted "c2001.".
- catalog description "Includes bibliographic references and author index.".
- catalog extent "vii, 174 p. :".
- catalog identifier "0819442208".
- catalog isPartOf "Proceedings of SPIE--the International Society for Optical Engineering ; v. 4506.".
- catalog isPartOf "SPIE proceedings series ; v. 4506".
- catalog isPartOf "SPIE proceedings series, 0277-786X ; v. 4506".
- catalog issued "2001".
- catalog issued "c2001.".
- catalog language "eng".
- catalog publisher "Bellingham, Washington : SPIE,".
- catalog subject "621.36 21".
- catalog subject "Grenz rays Congresses.".
- catalog subject "TA1775 .S618 2001".
- catalog subject "Ultraviolet radiation Industrial applications Congresses.".
- catalog subject "X-ray optics Congresses.".
- catalog subject "X-rays Industrial applications Congresses.".
- catalog title "Soft X-ray and EUV imaging systems II : 31 July-1 August, 2001, San Diego, [California] USA / Daniel A. Tichenor, James A. Folta, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering.".
- catalog type "text".