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- catalog contributor b12559836.
- catalog created "c2002.".
- catalog date "2002".
- catalog date "c2002.".
- catalog dateCopyrighted "c2002.".
- catalog description "Includes bibliographical references and index.".
- catalog description "Materials Research Society Symposium Proceedings -- Low Temperature Shallow Junction Formation for 70 nm Technology Node and Beyond / John O. Borland -- Electromagnetic Induction Heating for the 70 nm Node / Keith Thompson, John H. Booske, R.F. Cooper and Y.B. Gianchandani -- Study of the Effects of a Two-Step Anneal on the End of Range Defects in Silicon / Renata A. Camillo-Castillo, Kevin S. Jones, Mark E. Law and Leonard M. Rubin -- The Effect of Ge Content in MBE Si[subscript (1-x)]Ge[subscript (x)] on the Evolution of {311} Defects / Robert Crosby, Jackie Frazer, K.S. Jones, M.E. Law, A. Nylandsted Larsen and J. Lundsgaard Hansen.".
- catalog extent "xi, 312 p. :".
- catalog hasFormat "Silicon front-end junction formation technologies.".
- catalog identifier "1558996532".
- catalog isFormatOf "Silicon front-end junction formation technologies.".
- catalog isPartOf "Materials Research Society symposia proceedings ; v. 717.".
- catalog isPartOf "Materials Research Society symposium proceedings ; v. 717".
- catalog issued "2002".
- catalog issued "c2002.".
- catalog language "eng".
- catalog publisher "Warrendale, Pa. : Materials Research Society,".
- catalog relation "Silicon front-end junction formation technologies.".
- catalog subject "621.3815/282 21".
- catalog subject "Semiconductors Junctions Congresses.".
- catalog subject "TK7871.85 .S5455 2002".
- catalog tableOfContents "Materials Research Society Symposium Proceedings -- Low Temperature Shallow Junction Formation for 70 nm Technology Node and Beyond / John O. Borland -- Electromagnetic Induction Heating for the 70 nm Node / Keith Thompson, John H. Booske, R.F. Cooper and Y.B. Gianchandani -- Study of the Effects of a Two-Step Anneal on the End of Range Defects in Silicon / Renata A. Camillo-Castillo, Kevin S. Jones, Mark E. Law and Leonard M. Rubin -- The Effect of Ge Content in MBE Si[subscript (1-x)]Ge[subscript (x)] on the Evolution of {311} Defects / Robert Crosby, Jackie Frazer, K.S. Jones, M.E. Law, A. Nylandsted Larsen and J. Lundsgaard Hansen.".
- catalog title "Silicon front-end junction formation technologies / editors, Daniel F. Downey ... [et al.].".
- catalog type "Conference proceedings. fast".
- catalog type "San Francisco (Calif., 2002) swd".
- catalog type "text".