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- catalog contributor b12559839.
- catalog created "c2002.".
- catalog date "2002".
- catalog date "c2002.".
- catalog dateCopyrighted "c2002.".
- catalog description "Includes bibliographical references and indexes.".
- catalog description "Techniques and Applications -- Crystallographic Texture and Phase Metrology During Damascene Copper Processing / K.J. Kozaczek, P.W. DeHaven, K.P. Rodbell, S. Malhotra, D.S. Kurtz, R.I. Martin, P.R. Moran -- Accuracy and Reproducibility of X-ray Texture Measurements on Thin Films / Mark D. Vaudin, Glen R. Fox, Glen R. Kowach -- An In Situ Oblique-Incidence Optical Reflectance Difference Study of Co Electrodeposition on a Polycrystalline Au(111) Surface / J. Gray, W. Schwarzacher, X.D. Zhu -- Metal Films -- Texture Development and Twinning in Polycrystalline Gold Thin Films / Rachel E. Cefalu, Alexander H. King -- Molecular Dynamics Study of Cu Thin Film Deposition on [beta]-Ta / Peter Klaver, Barend J. Thijsse -- In Situ Studies of Silicide Formation in Ti-Ta Bilayer Thin Films on Poly-Si / A.S. Ozcan, K.F. Ludwig Jr., C. Lavoie, C. Cabral Jr., J.M.E. Harper -- Copper Films -- Texture and Resistivity of Cu and Dilute Cu Alloy Films / K. Barmak, A. Gungor, A.D. Rollett, C. Cabral Jr., J.M.E. Harper -- Cu and Dilute Binary Cu(Ti), Cu(Sn) and Cu(Al) Thin Films: Texture, Grain Growth and Resistivity / A. Gungor, K. Barmak, A.D. Rollett, C. Cabral Jr., J.M.E. Harper -- Texture and Microtexture of Copper Films Prepared by the Self-Ion Assisted Deposition Technique on Barrier Layers With Different Structure / Oleg V. Kononenko, Victor N. Matveev, Andrei G. Vasiliev, Ivan Khorin, Tejodher Muppidi, David P. Field.".
- catalog extent "xiii, 306 p. :".
- catalog hasFormat "Magnetic and electronic films.".
- catalog identifier "1558996575".
- catalog isFormatOf "Magnetic and electronic films.".
- catalog isPartOf "Materials Research Society symposia proceedings ; v. 721.".
- catalog isPartOf "Materials Research Society symposium proceedings ; v. 721".
- catalog issued "2002".
- catalog issued "c2002.".
- catalog language "eng".
- catalog publisher "Warrendale, Pa. : Materials Research Society,".
- catalog relation "Magnetic and electronic films.".
- catalog subject "621.39/7 21".
- catalog subject "Magnetic memory (Computers) Congresses.".
- catalog subject "Magnetic recorders and recording Materials Congresses.".
- catalog subject "Nanoparticles Congresses.".
- catalog subject "TK7895.M4 M335 2002".
- catalog subject "Thin film devices Congresses.".
- catalog tableOfContents "Techniques and Applications -- Crystallographic Texture and Phase Metrology During Damascene Copper Processing / K.J. Kozaczek, P.W. DeHaven, K.P. Rodbell, S. Malhotra, D.S. Kurtz, R.I. Martin, P.R. Moran -- Accuracy and Reproducibility of X-ray Texture Measurements on Thin Films / Mark D. Vaudin, Glen R. Fox, Glen R. Kowach -- An In Situ Oblique-Incidence Optical Reflectance Difference Study of Co Electrodeposition on a Polycrystalline Au(111) Surface / J. Gray, W. Schwarzacher, X.D. Zhu -- Metal Films -- Texture Development and Twinning in Polycrystalline Gold Thin Films / Rachel E. Cefalu, Alexander H. King -- Molecular Dynamics Study of Cu Thin Film Deposition on [beta]-Ta / Peter Klaver, Barend J. Thijsse -- In Situ Studies of Silicide Formation in Ti-Ta Bilayer Thin Films on Poly-Si / A.S. Ozcan, K.F. Ludwig Jr., C. Lavoie, C. Cabral Jr., J.M.E. Harper -- Copper Films -- Texture and Resistivity of Cu and Dilute Cu Alloy Films / K. Barmak, A. Gungor, A.D. Rollett, C. Cabral Jr., J.M.E. Harper -- Cu and Dilute Binary Cu(Ti), Cu(Sn) and Cu(Al) Thin Films: Texture, Grain Growth and Resistivity / A. Gungor, K. Barmak, A.D. Rollett, C. Cabral Jr., J.M.E. Harper -- Texture and Microtexture of Copper Films Prepared by the Self-Ion Assisted Deposition Technique on Barrier Layers With Different Structure / Oleg V. Kononenko, Victor N. Matveev, Andrei G. Vasiliev, Ivan Khorin, Tejodher Muppidi, David P. Field.".
- catalog title "Magnetic and electronic films : microstructure, texture, and application to data storage : symposia held April 1-4, 2002, San Francisco, California, U.S.A. / editors, Patrick W. DeHaven ... [et al.].".
- catalog type "Kongress. swd".
- catalog type "San Francisco (Calif., 2002) swd".
- catalog type "text".