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- catalog contributor b12564315.
- catalog created "2002.".
- catalog date "2002".
- catalog date "2002.".
- catalog dateCopyrighted "2002.".
- catalog description "Division of Engineering and Applied Sciences.".
- catalog description "Includes bibliographical references.".
- catalog description "Includes one offprint : Fabrication of arrays of two-dimensional micropatterns using microspheres as lenses for projection photolithography / Ming-Hsien Wu and George M. Whitesides (Applied physics letters, v.78:16, April 16, 2001, pp. 2273-2275)".
- catalog description "Thesis (Ph. D., Division of Engineering and Applied Sciences (Applied Physics))--Harvard University, 2002.".
- catalog extent "ix, 285 leaves :".
- catalog issued "2002".
- catalog issued "2002.".
- catalog language "eng".
- catalog subject "Microfabrication.".
- catalog subject "Photolithography.".
- catalog tableOfContents "Includes one offprint : Fabrication of arrays of two-dimensional micropatterns using microspheres as lenses for projection photolithography / Ming-Hsien Wu and George M. Whitesides (Applied physics letters, v.78:16, April 16, 2001, pp. 2273-2275)".
- catalog title "Use of micro-optical elements for microfabrication / a thesis presented by Ming-Hsien Wu.".
- catalog type "text".