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catalog contributor b12568418.
catalog contributor b12568419.
catalog created "c2002.".
catalog date "2002".
catalog date "c2002.".
catalog dateCopyrighted "c2002.".
catalog description "Group IV Alloy and Strained Materials and Devices -- Thermal Stability of Strained Si on Relaxed Si[subscript 1-x]Ge[subscript x] Buffer Layers / P.M. Mooney, S.J. Koester, J.A. Ott, J.L. Jordan-Sweet, J.O. Chu, K.K. Chan -- Structure and Characteristics of Strained-Si-On-Insulator (Strained-SOI) MOSFETs / Shin-ichi Takagi, Tsutomu Tezuka, Naoharu Sugiyama, Tomohisa Mizuno, Atsushi Kurobe -- Relaxed Silicon-Germanium on Insulator (SGOI) / Zhiyuan Cheng, Matthew T. Currie, Chris W. Leitz, Gianni Taraschi, Minjoo L. Lee, Arthur Pitera, Judy L. Hoyt, Dimitri A. Antoniadis, Eugene A. Fitzgerald -- Strain Relaxation Mechanisms in He[superscript +]-Implanted and Annealed Si[subscript 1-x]Ge[subscript x] Layers on Si(001) Substrates / S.H. Christiansen, P.M. Mooney, J.O. Chu, A. Grill -- Diffusion Behavior of Ion-Implanted n-type Dopants in Silicon Germanium / S. Eguchi, C.W. Leitz, E.A. Fitzgerald, J.L. Hoyt -- Strained Ge Channel p-Type MOSFETs Fabricated on Si[subscript 1-x]Ge[subscript x]/Si Virtual Substrates / Minjoo L. Lee, Christopher W. Leitz, Zhiyuan Cheng, Arthur J. Pitera, Gianni Taraschi, Dimitri A. Antoniadis, Eugene A. Fitzgerald -- Advanced Cmos: SOI and Vertical Devices -- The Study of the Formation of Thin SOI Structure by SIMOX With Water Plasma / Chen Jing, Chen Meng, Wang Xi, Dong Yemin, Zheng Zhihong, Wang Xi -- A Patterned SOI by Masked Anneal for System-On-Chip Applications / G.M. Cohen, D.K. Sadana -- Integration Challenges for Double-Gate MOSFET Technologies / W.P. Maszara.".
catalog description "Includes bibliographical references and indexes.".
catalog extent "xi, 280 p. :".
catalog hasFormat "Materials issues in novel Si-based technology.".
catalog identifier "1558996222".
catalog isFormatOf "Materials issues in novel Si-based technology.".
catalog isPartOf "Material Research Society symposia proceedings ; v. 686.".
catalog isPartOf "Material Research Society symposium proceedings ; v. 686".
catalog issued "2002".
catalog issued "c2002.".
catalog language "eng".
catalog publisher "Warrendale, PA : Materials Research Society,".
catalog relation "Materials issues in novel Si-based technology.".
catalog subject "Dielectrics Congresses.".
catalog subject "Integrated circuits Materials Congresses.".
catalog subject "Logic circuits Congresses.".
catalog subject "Semiconductors Materials Congresses.".
catalog subject "Silicon Optical properties Congresses.".
catalog subject "TK7871.15.S55 S96 2002".
catalog tableOfContents "Group IV Alloy and Strained Materials and Devices -- Thermal Stability of Strained Si on Relaxed Si[subscript 1-x]Ge[subscript x] Buffer Layers / P.M. Mooney, S.J. Koester, J.A. Ott, J.L. Jordan-Sweet, J.O. Chu, K.K. Chan -- Structure and Characteristics of Strained-Si-On-Insulator (Strained-SOI) MOSFETs / Shin-ichi Takagi, Tsutomu Tezuka, Naoharu Sugiyama, Tomohisa Mizuno, Atsushi Kurobe -- Relaxed Silicon-Germanium on Insulator (SGOI) / Zhiyuan Cheng, Matthew T. Currie, Chris W. Leitz, Gianni Taraschi, Minjoo L. Lee, Arthur Pitera, Judy L. Hoyt, Dimitri A. Antoniadis, Eugene A. Fitzgerald -- Strain Relaxation Mechanisms in He[superscript +]-Implanted and Annealed Si[subscript 1-x]Ge[subscript x] Layers on Si(001) Substrates / S.H. Christiansen, P.M. Mooney, J.O. Chu, A. Grill -- Diffusion Behavior of Ion-Implanted n-type Dopants in Silicon Germanium / S. Eguchi, C.W. Leitz, E.A. Fitzgerald, J.L. Hoyt -- Strained Ge Channel p-Type MOSFETs Fabricated on Si[subscript 1-x]Ge[subscript x]/Si Virtual Substrates / Minjoo L. Lee, Christopher W. Leitz, Zhiyuan Cheng, Arthur J. Pitera, Gianni Taraschi, Dimitri A. Antoniadis, Eugene A. Fitzgerald -- Advanced Cmos: SOI and Vertical Devices -- The Study of the Formation of Thin SOI Structure by SIMOX With Water Plasma / Chen Jing, Chen Meng, Wang Xi, Dong Yemin, Zheng Zhihong, Wang Xi -- A Patterned SOI by Masked Anneal for System-On-Chip Applications / G.M. Cohen, D.K. Sadana -- Integration Challenges for Double-Gate MOSFET Technologies / W.P. Maszara.".
catalog title "Materials issues in novel Si-based technology : symposium held November 26-28, 2001, Boston, Massachusetts, U.S.A. / editors, William G. En ... [et al.].".
catalog type "Conference proceedings. fast".
catalog type "Kongress. swd".
catalog type "text".