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- catalog alternative "Smart electronics and MEMS.".
- catalog alternative "Smart electronics, MEMS, and nanotechnology".
- catalog contributor b12583639.
- catalog contributor b12583640.
- catalog contributor b12583641.
- catalog contributor b12583642.
- catalog created "c2002.".
- catalog date "2002".
- catalog date "c2002.".
- catalog dateCopyrighted "c2002.".
- catalog description "Includes bibliographical references and index.".
- catalog extent "viii, 360 p. :".
- catalog identifier "0819444480".
- catalog isPartOf "Proceedings of SPIE--the International Society for Optical Engineering ; v. 4700.".
- catalog isPartOf "SPIE proceedings series, 0277-786X ; v. 4700".
- catalog issued "2002".
- catalog issued "c2002.".
- catalog language "eng".
- catalog publisher "Bellingham, Wash. : SPIE,".
- catalog subject "Actuators Congresses.".
- catalog subject "Microelectromechanical systems Congresses.".
- catalog subject "Microelectronics Materials Congresses.".
- catalog subject "Nanotechnology Congresses.".
- catalog subject "Smart materials Congresses.".
- catalog subject "TK7874 .S592 2002".
- catalog title "Smart electronics, MEMS, and nanotechnology".
- catalog title "Smart structures and materials 2002. Smart electronics, MEMS, and nanotechnology : 18-20 March 2002, San Diego, USA / Vijay K. Varadan, chair/editor ; sponsored ... by SPIE--the International Society for Optical Engineering ; cosponsored by ASME--American Society for Mechanical Engineers ... [et al.] ; cooperating organizations, Air Force Office of Scientific Research (USA) ... [et al.].".
- catalog type "text".