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- catalog contributor b12628750.
- catalog contributor b12628751.
- catalog contributor b12628752.
- catalog created "c2002.".
- catalog date "2002".
- catalog date "c2002.".
- catalog dateCopyrighted "c2002.".
- catalog description "Includes bibliographical references and index.".
- catalog extent "v, 104 p. :".
- catalog identifier "0819443867".
- catalog isPartOf "Proceedings of SPIE--the International Society for Optical Engineering ; v. 4647.".
- catalog isPartOf "SPIE proceedings series, 0277-786X ; v. 4647".
- catalog issued "2002".
- catalog issued "c2002.".
- catalog language "eng".
- catalog publisher "Bellingham, Wash., USA : SPIE,".
- catalog subject "Microelectromechanical systems Congresses.".
- catalog subject "Microelectronic packaging Congresses.".
- catalog subject "Optoelectronic devices Congresses.".
- catalog subject "TK8300 .F852 2002".
- catalog title "Functional integration of opto-electro-mechanical devices and systems II : 23-24 January 2002, San Jose, USA / Michael R. Descour, Juha T. Rantala, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering.".
- catalog type "text".