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catalog contributor b12634692.
catalog contributor b12634693.
catalog created "c2002.".
catalog date "2002".
catalog date "c2002.".
catalog dateCopyrighted "c2002.".
catalog description "Charge Transport in Low Stress Si-Rich Silicon Nitride Thin Films / S. Habermehl and C. Carmignani -- Fabrication of 3D Feed Horn Shape MEMS Antenna Array using MRPBI (Mirror Reflected Parallel Beam Illuminator) System With an Ultra-Slow-Rotated and Inclined X-Y-Z Stage / Jong-Yeon Park, Kun-Tae Kim and Sung Moon / [et al.] -- Indentation Delamination and Indentation Fracture in ZnO/Si Systems / Bin Huang, Ming-Hao Zhao and Tong-Yi Zhang -- Fabrication of Piezoelectric Diaphragm Using Lead Zirconate Titanate (PZT) Films / E. Hong, S. V. Krishnaswamy and C. B. Freidhoff / [et al.] -- Neutron Irradiation-Induced Dimensional Changes in MEMS Glass Substrates / Clark L. Allred, Jeffrey T. Borenstein and Linn W. Hobbs -- Issues With Gold Electroplating for Microelectromechanical System Applications / Caroline A. Kondoleon and Thomas F. Marinis -- The Fabrication of Stainless Steel Parts for MEMS / Terry J. Garino, Alfredo Morales and Thomas Buchheit / [et al.] -- ".
catalog description "Electrofluidic Assembly of Nanoelectromechanical Systems / Stephane Evoy, Ben Hailer and Martin Duemling / [et al.] -- Micromachined Nanoparticulate Ceramic Gas Sensor Array on MEMS Substrates / Martin Heule and Ludwig J. Gauckler -- Strength Analysis of a Micro-Rocket Combustion Chamber / Erin E. Noonan, Christopher S. Protz and Yoav P. Peles / [et al.] -- Surface Micromachined Polysilicon Components Containing Continuous Hinges and Microrivets Used to Realize Three-Dimensional MEMS Structures / Edward S. Kolesar, Matthew D. Ruff and William E. Odom / [et al.] -- Ferromagnetic MiMnGa and CoNiGa Shape Memory Alloy Films / C. Craciunescu, Y. Kishi and L. Saraf / [et al.] -- Aluminum-Silicon and Gold-Silicon Eutectics: New Opportunities for MEMS Technologies / Ciprian Iliescu, Daniel P. Poenar and Jianmin Miao -- On the Unification of Material Strength Testing for MEMS Applications / Kuo-Shen Chen -- ".
catalog description "Includes bibliographical references and indexes.".
catalog description "Microsensors for Automotive Applications -- Metrology and Test / Gottfried Flik, Heinz Eisenschmid and Carsten Raudzis / [et al.] -- Three-Dimensional Thermal Effects in MEMS Devices / Edward Van Keuren, John Currie and Matthew Nelson / [et al.] -- Piezoelectric Shear Mode Inkjet Actuator / Jurgen Brunahl, Alex M. Grishin and Sergey I. Khartsev / [et al.] -- Mechanisms of Fatigue in Polysilicon MEMS Structures / P. Shrotriya, S. Allameh and A. Butterwick / [et al.] -- Size Effects Determined From Tensile Tests of Perforated MEMS Scale Specimens / Ioannis Chasiotis and Wolfgang G. Knauss -- Plasticity Length Scale in LIGA Nickel MEMS Structures / J. Lou, P. Shrotriya and S. Allameh / [et al.] -- Bonding of Bulk Piezoelectric Material to Silicon Using a Gold-Tin Eutectic Bond / Kevin T. Turner, Richard Mlcak and David C. Roberts / [et al.] -- Electro-Mechanical Coupling and Power Generation in a PZT Micro-Engine / D. F. Bahr, K. R. Bruce and B. W. Olson / [et al.] -- ".
catalog description "On The Mechanism of Fatigue in Micron-Scale Structural Films of Polycrystalline Silicon / C. L. Muhlstein, E. A. Stach and R. O. Ritchie.".
catalog description "Process Development of Silicon-Silicon Carbide Hybrid Micro-Engine Structures / Dongwon Choi, Robert J. Shinavski and Wayne S. Steffier / [et al.] -- Tensile Test of Bulk- and Surface-Micromachined 0.1 [mu]m Thick Silicon Film Using Electrostatic Force Grip System / Toshiyuki Tsuchiya, Jiro Sakata and M. Shikida / [et al.] -- Characteristics of Thick Sol-Gel Lead Zirconate Titanate Films for Angular Rate Sensor Application / S. H. Lee, T. Iijima and K. Nakamura / [et al.] -- Mechanical Properties of Thin Film Silicon Carbide / Kamili M. Jackson, Richard L. Edwards and Guy F. Dirras / [et al.] -- Add Ceramic "MEMS" to the Pallet of MicroSystems Technologies / David L. Wilcox, Sr, Jeremy W. Burdon and Rajnish Changrani / [et al.] -- Palladium Based Micro-Membrane Hydrogen Gas Separator-Reactor in a Miniature Fuel Processor for Micro Fuel Cells / Sooraj V. Karnik, Miltiadis K. Hatalis and Mayuresh V. Kothare -- ".
catalog description "The Materials Science of "Permeable Polysilicon" Thin Films / George M. Dougherty, Timothy Sands and Albert P. Pisano -- Materials Issues in the Application of Silicon Nitride Films in Silicon MEMS / David F. Moore, Roger M. Bostock and Paul Boyle / [et al.] -- Mechanical Properties of 0.1 micron Thick SIMOX Film Measured Using On-Chip Tensile Test System / J. Amano, T. Ando and M. Shikida / [et al.] -- Silicon Microfabrication: Laser Ablation vs. Inductively Coupled Plasma (ICP) Etch / Megan M. Owens, Joseph W. Soucy and Thomas F. Marinis -- A Constitutive Model for the Mechanical Behavior of Single Crystal Silicon at Elevated Temperature / H.-S. Moon, L. Anand and S. M. Spearing -- Fracture Strength of Polysilicon Thin Films at Stress Concentrations / J. Bagdahn and W. N. Sharpe, Jr. -- Mechanical Testing of Free-Standing Thin Films / W. N. Sharpe, Jr. and K. J. Hemker -- ".
catalog description "Thermal Losses and Temperature Measurement in SOI MEMS Heater / Nicholas Moelders, Irina Puscasu and Mark P. McNeal / [et al.] -- Fabrication of MEMS Tonpilz Transducers / Q. F. Zhou, L.-P. Wang and G. Gerber / [et al.] -- New MEMS Technology Using Multi-Layer NILC Poly-Si and NiSi Films / W. M. Cheung, C. F. Cheng and M. C. Poon / [et al.] -- Microstructuring of Silica and Polymethylmethacrylate Glasses by Femtosecond Irradiation for MEMS Applications / Saulius Juodkazis, Kazuhiko Yamasaki and Andrius Marcinkevicius / [et al.] -- Frictional Properties of Self-Assembled Alkylsilane Chains on Silica / M. Chandross, B. Park and M. Stevens / [et al.] -- Design and Modelling of a Fourier Spectrometer Based on Sampling a Standing Wave / D. Knipp, H. Stiebig and H.-J. Buchner / [et al.] -- Microfabricated Crevice Former with A Sensor Array / Xiaoyan Wang, Robert G. Kelly and Michael L. Reed -- ".
catalog extent "xi, 318 p. :".
catalog hasFormat "Materials science of microelectromechanical systems (MEMS) devices IV.".
catalog identifier "1558996230".
catalog isFormatOf "Materials science of microelectromechanical systems (MEMS) devices IV.".
catalog isPartOf "Materials Research Society symposia proceedings ; v. 687.".
catalog isPartOf "Materials Research Society symposium proceedings ; v. 687".
catalog issued "2002".
catalog issued "c2002.".
catalog language "eng".
catalog publisher "Warrendale, Pa. : Materials Research Society,".
catalog relation "Materials science of microelectromechanical systems (MEMS) devices IV.".
catalog subject "621.381 21".
catalog subject "Microelectromechanical systems Materials Congresses.".
catalog subject "TK7875 .M38 2001".
catalog tableOfContents "Charge Transport in Low Stress Si-Rich Silicon Nitride Thin Films / S. Habermehl and C. Carmignani -- Fabrication of 3D Feed Horn Shape MEMS Antenna Array using MRPBI (Mirror Reflected Parallel Beam Illuminator) System With an Ultra-Slow-Rotated and Inclined X-Y-Z Stage / Jong-Yeon Park, Kun-Tae Kim and Sung Moon / [et al.] -- Indentation Delamination and Indentation Fracture in ZnO/Si Systems / Bin Huang, Ming-Hao Zhao and Tong-Yi Zhang -- Fabrication of Piezoelectric Diaphragm Using Lead Zirconate Titanate (PZT) Films / E. Hong, S. V. Krishnaswamy and C. B. Freidhoff / [et al.] -- Neutron Irradiation-Induced Dimensional Changes in MEMS Glass Substrates / Clark L. Allred, Jeffrey T. Borenstein and Linn W. Hobbs -- Issues With Gold Electroplating for Microelectromechanical System Applications / Caroline A. Kondoleon and Thomas F. Marinis -- The Fabrication of Stainless Steel Parts for MEMS / Terry J. Garino, Alfredo Morales and Thomas Buchheit / [et al.] -- ".
catalog tableOfContents "Electrofluidic Assembly of Nanoelectromechanical Systems / Stephane Evoy, Ben Hailer and Martin Duemling / [et al.] -- Micromachined Nanoparticulate Ceramic Gas Sensor Array on MEMS Substrates / Martin Heule and Ludwig J. Gauckler -- Strength Analysis of a Micro-Rocket Combustion Chamber / Erin E. Noonan, Christopher S. Protz and Yoav P. Peles / [et al.] -- Surface Micromachined Polysilicon Components Containing Continuous Hinges and Microrivets Used to Realize Three-Dimensional MEMS Structures / Edward S. Kolesar, Matthew D. Ruff and William E. Odom / [et al.] -- Ferromagnetic MiMnGa and CoNiGa Shape Memory Alloy Films / C. Craciunescu, Y. Kishi and L. Saraf / [et al.] -- Aluminum-Silicon and Gold-Silicon Eutectics: New Opportunities for MEMS Technologies / Ciprian Iliescu, Daniel P. Poenar and Jianmin Miao -- On the Unification of Material Strength Testing for MEMS Applications / Kuo-Shen Chen -- ".
catalog tableOfContents "Microsensors for Automotive Applications -- Metrology and Test / Gottfried Flik, Heinz Eisenschmid and Carsten Raudzis / [et al.] -- Three-Dimensional Thermal Effects in MEMS Devices / Edward Van Keuren, John Currie and Matthew Nelson / [et al.] -- Piezoelectric Shear Mode Inkjet Actuator / Jurgen Brunahl, Alex M. Grishin and Sergey I. Khartsev / [et al.] -- Mechanisms of Fatigue in Polysilicon MEMS Structures / P. Shrotriya, S. Allameh and A. Butterwick / [et al.] -- Size Effects Determined From Tensile Tests of Perforated MEMS Scale Specimens / Ioannis Chasiotis and Wolfgang G. Knauss -- Plasticity Length Scale in LIGA Nickel MEMS Structures / J. Lou, P. Shrotriya and S. Allameh / [et al.] -- Bonding of Bulk Piezoelectric Material to Silicon Using a Gold-Tin Eutectic Bond / Kevin T. Turner, Richard Mlcak and David C. Roberts / [et al.] -- Electro-Mechanical Coupling and Power Generation in a PZT Micro-Engine / D. F. Bahr, K. R. Bruce and B. W. Olson / [et al.] -- ".
catalog tableOfContents "On The Mechanism of Fatigue in Micron-Scale Structural Films of Polycrystalline Silicon / C. L. Muhlstein, E. A. Stach and R. O. Ritchie.".
catalog tableOfContents "Process Development of Silicon-Silicon Carbide Hybrid Micro-Engine Structures / Dongwon Choi, Robert J. Shinavski and Wayne S. Steffier / [et al.] -- Tensile Test of Bulk- and Surface-Micromachined 0.1 [mu]m Thick Silicon Film Using Electrostatic Force Grip System / Toshiyuki Tsuchiya, Jiro Sakata and M. Shikida / [et al.] -- Characteristics of Thick Sol-Gel Lead Zirconate Titanate Films for Angular Rate Sensor Application / S. H. Lee, T. Iijima and K. Nakamura / [et al.] -- Mechanical Properties of Thin Film Silicon Carbide / Kamili M. Jackson, Richard L. Edwards and Guy F. Dirras / [et al.] -- Add Ceramic "MEMS" to the Pallet of MicroSystems Technologies / David L. Wilcox, Sr, Jeremy W. Burdon and Rajnish Changrani / [et al.] -- Palladium Based Micro-Membrane Hydrogen Gas Separator-Reactor in a Miniature Fuel Processor for Micro Fuel Cells / Sooraj V. Karnik, Miltiadis K. Hatalis and Mayuresh V. Kothare -- ".
catalog tableOfContents "The Materials Science of "Permeable Polysilicon" Thin Films / George M. Dougherty, Timothy Sands and Albert P. Pisano -- Materials Issues in the Application of Silicon Nitride Films in Silicon MEMS / David F. Moore, Roger M. Bostock and Paul Boyle / [et al.] -- Mechanical Properties of 0.1 micron Thick SIMOX Film Measured Using On-Chip Tensile Test System / J. Amano, T. Ando and M. Shikida / [et al.] -- Silicon Microfabrication: Laser Ablation vs. Inductively Coupled Plasma (ICP) Etch / Megan M. Owens, Joseph W. Soucy and Thomas F. Marinis -- A Constitutive Model for the Mechanical Behavior of Single Crystal Silicon at Elevated Temperature / H.-S. Moon, L. Anand and S. M. Spearing -- Fracture Strength of Polysilicon Thin Films at Stress Concentrations / J. Bagdahn and W. N. Sharpe, Jr. -- Mechanical Testing of Free-Standing Thin Films / W. N. Sharpe, Jr. and K. J. Hemker -- ".
catalog tableOfContents "Thermal Losses and Temperature Measurement in SOI MEMS Heater / Nicholas Moelders, Irina Puscasu and Mark P. McNeal / [et al.] -- Fabrication of MEMS Tonpilz Transducers / Q. F. Zhou, L.-P. Wang and G. Gerber / [et al.] -- New MEMS Technology Using Multi-Layer NILC Poly-Si and NiSi Films / W. M. Cheung, C. F. Cheng and M. C. Poon / [et al.] -- Microstructuring of Silica and Polymethylmethacrylate Glasses by Femtosecond Irradiation for MEMS Applications / Saulius Juodkazis, Kazuhiko Yamasaki and Andrius Marcinkevicius / [et al.] -- Frictional Properties of Self-Assembled Alkylsilane Chains on Silica / M. Chandross, B. Park and M. Stevens / [et al.] -- Design and Modelling of a Fourier Spectrometer Based on Sampling a Standing Wave / D. Knipp, H. Stiebig and H.-J. Buchner / [et al.] -- Microfabricated Crevice Former with A Sensor Array / Xiaoyan Wang, Robert G. Kelly and Michael L. Reed -- ".
catalog title "Materials Science of Microelectromechanical Systems (MEMS) Devices IV : symposium held November 25-28, 2001, Boston, Massachusetts, U.S.A. / editors, Arturo A. Ayón ... [et al.].".
catalog type "Conference proceedings. fast".
catalog type "text".