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- catalog alternative "Ultra clean processing of silicon surfaces".
- catalog contributor b12640126.
- catalog contributor b12640127.
- catalog contributor b12640128.
- catalog contributor b12640129.
- catalog created "1996.".
- catalog date "1996".
- catalog date "1996.".
- catalog dateCopyrighted "1996.".
- catalog description "Includes bibliographical references and index.".
- catalog extent "349 p. :".
- catalog identifier "9033437589 (pbk.)".
- catalog issued "1996".
- catalog issued "1996.".
- catalog language "eng".
- catalog publisher "Leuven : Acco,".
- catalog subject "Contamination control Congresses.".
- catalog subject "Semiconductor wafers Cleaning Congresses.".
- catalog subject "Silicon Surfaces Congresses.".
- catalog subject "TK7871.85 . I58435 1996".
- catalog title "Proceedings of the Third International Symposium on Ultra Clean Processing of Silicon Surfaces (UCPSS '96) / Marc Heyns (editor), Marc Meuris & Paul Mertens (co-editors).".
- catalog title "Ultra clean processing of silicon surfaces".
- catalog type "text".