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- catalog contributor b12640138.
- catalog contributor b12640139.
- catalog contributor b12640140.
- catalog contributor b12640141.
- catalog created "c2001.".
- catalog date "2001".
- catalog date "c2001.".
- catalog dateCopyrighted "c2001.".
- catalog description "Includes bibliographical references and indexes.".
- catalog extent "xiii, 321 p. :".
- catalog identifier "3908450578".
- catalog identifier "9783908450573".
- catalog isPartOf "Diffusion and defect data. Pt. B, Solid state phenomena ; v. 76-77.".
- catalog isPartOf "Solid state phenomena ; v. 76-77".
- catalog issued "2001".
- catalog issued "c2001.".
- catalog language "eng".
- catalog publisher "Zeurich-Uetikon, Switzerland : Scitec Publications,".
- catalog subject "Contamination control Congresses.".
- catalog subject "Silicon Surfaces Congresses.".
- catalog title "Ultra clean processing of silicon surfaces 2000 : proceedings of the Fifth International Symposium on Ultra Clean Processing of Silicon Surfaces (UCPSS 2000), held in Ostend, Belgium, September 18-20, 2000 / editors Marc Heyns, Paul Mertens and Marc Meuris.".
- catalog type "text".