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- catalog contributor b12796698.
- catalog created "2002.".
- catalog date "2002".
- catalog date "2002.".
- catalog dateCopyrighted "2002.".
- catalog description "Includes bibliographical references.".
- catalog description "Thesis (Ph. D., Dept. of Chemistry and Chemical Biology)--Harvard University, 2003.".
- catalog extent "xi, 154 leaves : 28 cm.".
- catalog issued "2002".
- catalog issued "2002.".
- catalog language "eng".
- catalog subject "Thin film devices Design and construction.".
- catalog subject "Thin films.".
- catalog title "Atomic layer deposition of metal oxide and nitride thin films / a thesis presented by Jill Svenja Becker.".
- catalog type "text".