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- catalog alternative "Workshop on Mass Flow Measurement and Control for the Semiconductor Industry".
- catalog contributor b12826047.
- catalog contributor b12826048.
- catalog contributor b12826049.
- catalog contributor b12826050.
- catalog contributor b12826051.
- catalog created "[2001]".
- catalog date "2001".
- catalog date "[2001]".
- catalog dateCopyrighted "[2001]".
- catalog extent "iii, 86 p. :".
- catalog isPartOf "NIST special publication ; 400-101".
- catalog isPartOf "Semiconductor measurement technology".
- catalog issued "2001".
- catalog issued "[2001]".
- catalog language "eng".
- catalog publisher "Gaithersburg, Md. : U.S. Dept. of Commerce, Technology Administration, National Institute of Standards and Technology ; Washington, DC : For sale by the Supt. of Docs., U.S. G.P.O.,".
- catalog subject "Semiconductor industry Congresses.".
- catalog subject "Semiconductor production equipment industry Congresses.".
- catalog title "Workshop on Mass Flow Measurement and Control for the Semiconductor Industry [microform] / Robert F. Berg, David S. Green, and George E. Mattingly.".
- catalog title "Workshop on Mass Flow Measurement and Control for the Semiconductor Industry".
- catalog type "text".