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- catalog contributor b12830281.
- catalog contributor b12830282.
- catalog contributor b12830283.
- catalog created "c2003.".
- catalog date "2003".
- catalog date "c2003.".
- catalog dateCopyrighted "c2003.".
- catalog description "Includes bibliographical references and indexes.".
- catalog extent "xiii, 384 p. :".
- catalog hasFormat "Novel materials and processes for advanced CMOS.".
- catalog identifier "1558996826".
- catalog isFormatOf "Novel materials and processes for advanced CMOS.".
- catalog isPartOf "Materials Research Society symposia proceedings ; v. 745.".
- catalog isPartOf "Materials Research Society symposium proceedings ; v. 745".
- catalog issued "2003".
- catalog issued "c2003.".
- catalog language "eng".
- catalog publisher "Warrendale, Pa. : Materials Research Society,".
- catalog relation "Novel materials and processes for advanced CMOS.".
- catalog subject "Dielectrics Congresses.".
- catalog subject "Gate array circuits Materials Congresses.".
- catalog subject "Metal oxide semiconductors Materials Congresses.".
- catalog subject "Metal oxide semiconductors, Complementary Materials Congresses.".
- catalog subject "Nanostructured materials Congresses.".
- catalog subject "TK7871.99.M44 S96 2003".
- catalog title "Novel materials and processes for advanced CMOS : symposium held December 2-4, 2002, Boston, Massachusetts / editors, Mark I. Gardener ... [et al.].".
- catalog type "text".