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- catalog contributor b12893026.
- catalog contributor b12893027.
- catalog created "[2001]".
- catalog date "2001".
- catalog date "[2001]".
- catalog dateCopyrighted "[2001]".
- catalog description "Includes bibliographical references (p. 42-44).".
- catalog extent "vi, 81 p. :".
- catalog isPartOf "NISTIR ; 6779".
- catalog issued "2001".
- catalog issued "[2001]".
- catalog language "eng".
- catalog publisher "Gaithersburg, MD : U.S. Dept. of Commerce, Technology Administration, National Institute of Standards and Technology,".
- catalog subject "Interferometers.".
- catalog subject "Microelectromechanical systems.".
- catalog title "MEMS length and strain measurements using an optical interferometer [microform] / J.C. Marshall.".
- catalog type "text".