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- catalog contributor b12931106.
- catalog created "2003.".
- catalog date "2003".
- catalog date "2003.".
- catalog dateCopyrighted "2003.".
- catalog description "Includes bibliographical references.".
- catalog description "Thesis (Ph. D., Dept. of Chemistry and Chemical Biology)--Harvard University, 2003.".
- catalog extent "xvii, 138 leaves ;".
- catalog issued "2003".
- catalog issued "2003.".
- catalog language "eng".
- catalog subject "Chemical vapor deposition.".
- catalog subject "Thin films.".
- catalog title "Chemical vapor deposition and atomic layer deposition of metal oxide and nitride thin films / by Jeffrey Thomas Barton.".
- catalog type "text".