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- catalog contributor b13065995.
- catalog contributor b13065996.
- catalog contributor b13065997.
- catalog contributor b13065998.
- catalog created "c2003.".
- catalog date "2003".
- catalog date "c2003.".
- catalog dateCopyrighted "c2003.".
- catalog description "Includes bibliographical references and indexes.".
- catalog extent "xi, 308 p. :".
- catalog hasFormat "CMOS front-end materials and process technology.".
- catalog identifier "1558997024".
- catalog isFormatOf "CMOS front-end materials and process technology.".
- catalog isPartOf "Materials Research Society symposia proceedings ; v. 765.".
- catalog isPartOf "Materials Research Society symposium proceedings ; v. 765".
- catalog issued "2003".
- catalog issued "c2003.".
- catalog language "eng".
- catalog publisher "Warrendale, Pa. : Materials Research Society,".
- catalog relation "CMOS front-end materials and process technology.".
- catalog subject "Dielectrics Congresses.".
- catalog subject "Gate array circuits Materials Congresses.".
- catalog subject "Metal oxide semiconductors Materials Congresses.".
- catalog subject "Metal oxide semiconductors, Complementary Materials Congresses.".
- catalog subject "Nanostructured materials Congresses.".
- catalog subject "TK7871.99.M44 C572 2003".
- catalog title "CMOS front-end materials and process technology : symposium held April 22-24, 2003, San Francisco, California, U.S.A. / editors, Tsu-Jae King ... [et al.].".
- catalog type "San Francisco (Calif., 2003) swd".
- catalog type "text".