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- catalog contributor b13066072.
- catalog contributor b13066073.
- catalog contributor b13066074.
- catalog contributor b13066075.
- catalog created "c2003.".
- catalog date "2003".
- catalog date "c2003.".
- catalog dateCopyrighted "c2003.".
- catalog description "Includes bibliographic references and indexes.".
- catalog extent "xv, 515 p. :".
- catalog hasFormat "Materials, technology and reliability for advanced interconnects and low-k dielectrics, 2003.".
- catalog identifier "1558997032".
- catalog isFormatOf "Materials, technology and reliability for advanced interconnects and low-k dielectrics, 2003.".
- catalog isPartOf "Materials Research Society symposia proceedings ; v. 766.".
- catalog isPartOf "Materials Research Society symposium proceedings ; v. 766".
- catalog issued "2003".
- catalog issued "c2003.".
- catalog language "eng".
- catalog publisher "Warrendale, Pa. : Materials Research Society,".
- catalog relation "Materials, technology and reliability for advanced interconnects and low-k dielectrics, 2003.".
- catalog subject "Dielectric films Congresses.".
- catalog subject "Integrated circuits Materials Congresses.".
- catalog subject "Integrated circuits Reliability Congresses.".
- catalog subject "Semiconductors Junctions Congresses.".
- catalog subject "Semiconductors Materials Congresses.".
- catalog subject "TK7871.85 .S95343 2003".
- catalog title "Materials, technology and reliability for advanced interconnects and low-k dielectrics--2003 : symposium held April 21-25, 2003, San Francisco, California, U.S.A / editors: Andrew J. McKerroe ... [et al.].".
- catalog type "Conference proceedings. fast".
- catalog type "text".