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- catalog contributor b13110790.
- catalog contributor b13110791.
- catalog contributor b13110792.
- catalog created "c2003.".
- catalog date "2003".
- catalog date "c2003.".
- catalog dateCopyrighted "c2003.".
- catalog description "Includes bibliographical references and index.".
- catalog extent "xii, 666 p. :".
- catalog identifier "0471457728 (cloth)".
- catalog issued "2003".
- catalog issued "c2003.".
- catalog language "eng".
- catalog publisher "Hoboken, NJ : John Wiley,".
- catalog subject "621.39/5 21".
- catalog subject "Electron microscopy.".
- catalog subject "Integrated circuits Ultra large scale integration Atlases.".
- catalog subject "TK7874.76 .T86 2003".
- catalog title "ULSI semiconductor technology atlas / Chih-Hang Tung, George T.T. Sheng, Chih-Yuan Lu.".
- catalog type "text".