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- catalog contributor b13132224.
- catalog contributor b13132225.
- catalog contributor b13132226.
- catalog created "c2004.".
- catalog date "2004".
- catalog date "c2004.".
- catalog dateCopyrighted "c2004.".
- catalog description "Includes bibliographical references and author index.".
- catalog description "Technology, market, and reliability status of MEMS applications -- Acoustics -- RF MEMS -- Space applications -- Applications of sensors and actuators -- Current topics I -- Current topics II.".
- catalog extent "xxxi, 232 p. :".
- catalog identifier "0819452521".
- catalog isPartOf "Proceedings of SPIE--the International Society for Optical Engineering ; v. 5344.".
- catalog isPartOf "SPIE proceedings series ; v. 5344".
- catalog issued "2004".
- catalog issued "c2004.".
- catalog language "eng".
- catalog publisher "Bellingham, Wash. : SPIE,".
- catalog subject "Microelectromechanical systems Congresses.".
- catalog subject "Optoelectronic devices Congresses.".
- catalog subject "TK7875 .M45377 2004".
- catalog tableOfContents "Technology, market, and reliability status of MEMS applications -- Acoustics -- RF MEMS -- Space applications -- Applications of sensors and actuators -- Current topics I -- Current topics II.".
- catalog title "MEMS/MOEMS components and their applications : 26-27 January, 2004, San Jose, California, USA / Siegfried W. Janson, Albert K. Henning, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering.".
- catalog type "Conference proceedings. fast".
- catalog type "text".