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- catalog contributor b13152953.
- catalog created "c2004.".
- catalog date "2004".
- catalog date "c2004.".
- catalog dateCopyrighted "c2004.".
- catalog description "Includes bibliographical references and index.".
- catalog extent "x, 366 p. :".
- catalog identifier "1402077734".
- catalog issued "2004".
- catalog issued "c2004.".
- catalog language "eng".
- catalog publisher "Boston : Kluwer Academic Publishers,".
- catalog subject "621.3815/2 21".
- catalog subject "Integrated circuits Very large scale integration Materials.".
- catalog subject "Semiconductors.".
- catalog subject "Silicon-on-insulator technology.".
- catalog subject "TK7871.85 .C758 2004".
- catalog title "Silicon-on-insulator technology : materials to VLSI / by Jean-Pierre Colinge.".
- catalog type "text".