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- catalog contributor b13186599.
- catalog contributor b13186600.
- catalog created "1989.".
- catalog date "1989".
- catalog date "1989.".
- catalog dateCopyrighted "1989.".
- catalog description "Includes bibliographies and index.".
- catalog extent "172 p. :".
- catalog identifier "0521322545".
- catalog isPartOf "Cambridge studies in modern optics ; 7".
- catalog issued "1989".
- catalog issued "1989.".
- catalog language "eng".
- catalog publisher "Cambridge [England] ; New York : Cambridge University Press,".
- catalog subject "621.381/73 19".
- catalog subject "Integrated circuits Design and construction.".
- catalog subject "Lasers Industrial applications.".
- catalog subject "Microelectronic devices Manufacture Use of lasers".
- catalog subject "TK7874 .L298 1989".
- catalog title "Laser chemical processing for microelectronics / edited by K.G. Ibbs, R.M. Osgood.".
- catalog type "text".