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- catalog contributor b13187223.
- catalog contributor b13187224.
- catalog contributor b13187225.
- catalog contributor b13187226.
- catalog created "c1983.".
- catalog date "1983".
- catalog date "c1983.".
- catalog dateCopyrighted "c1983.".
- catalog description "Includes bibliographical references and indexes.".
- catalog extent "xiii, 298 p. :".
- catalog hasFormat "Laser diagnostics and photochemical processing for semiconductor devices.".
- catalog identifier "0444007822 :".
- catalog isFormatOf "Laser diagnostics and photochemical processing for semiconductor devices.".
- catalog isPartOf "Materials Research Society symposia proceedings ; v. 17".
- catalog issued "1983".
- catalog issued "c1983.".
- catalog language "eng".
- catalog publisher "New York : North-Holland,".
- catalog relation "Laser diagnostics and photochemical processing for semiconductor devices.".
- catalog subject "621.3815/2 19".
- catalog subject "Lasers Industrial applications Congresses.".
- catalog subject "Resistencia Dos Materiais larpcal".
- catalog subject "Semiconductor devices Production Use of lasers".
- catalog subject "Semiconductors Congresses.".
- catalog subject "TA1673 .L355 1983".
- catalog title "Laser diagnostics and photochemical processing for semiconductor devices : symposium held November 1982 in Boston, Massachusetts, U.S.A. / editors, R.M. Osgood, S.R.J. Brueck, and H.R. Schlossberg.".
- catalog type "Conference proceedings. fast".
- catalog type "text".