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- catalog contributor b13201488.
- catalog created "c2004.".
- catalog date "2003".
- catalog date "c2004.".
- catalog dateCopyrighted "c2004.".
- catalog description "Includes bibliographical references.".
- catalog description "Microelectronics: design, technology, and packaging -- BioMEMS and nanotechnology -- Device and process technologies for MEMS, Microelectronics, and Photonics III -- Photonics: design, technology and packaging.".
- catalog description "System requirements: computer with CD-ROM drive; Adobe Acrobat Reader with Search.".
- catalog extent "1 CD-ROM :".
- catalog identifier "0819451878".
- catalog isPartOf "Proceedings of SPIE on CD-ROM ; CDS112".
- catalog issued "2003".
- catalog issued "c2004.".
- catalog language "eng".
- catalog publisher "Bellingham, Wash. : SPIE,".
- catalog requires "System requirements: computer with CD-ROM drive; Adobe Acrobat Reader with Search.".
- catalog subject "Microelectromechanical systems Congresses.".
- catalog subject "Microelectronics Congresses.".
- catalog subject "Nanotechnology Congresses.".
- catalog tableOfContents "Microelectronics: design, technology, and packaging -- BioMEMS and nanotechnology -- Device and process technologies for MEMS, Microelectronics, and Photonics III -- Photonics: design, technology and packaging.".
- catalog title "Microelectronics, MEMS and nanotechnology 2003 [electronic resource] : 10-12 December 2003, Perth, Australia.".
- catalog type "CD-ROMs. local".
- catalog type "text".