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- catalog alternative "Device and process technologies for MEMS and microelectronics.".
- catalog contributor b13201567.
- catalog contributor b13201568.
- catalog contributor b13201569.
- catalog contributor b13201570.
- catalog created "c2004.".
- catalog date "2004".
- catalog date "c2004.".
- catalog dateCopyrighted "c2004.".
- catalog description "Includes bibliographical references and index.".
- catalog extent "xxxiv, 566 p. :".
- catalog identifier "081945169X".
- catalog isPartOf "Proceedings of SPIE--the International Society for Optical Engineering ; v. 5276.".
- catalog isPartOf "SPIE proceedings series, 0277-786X ; v. 5276".
- catalog issued "2004".
- catalog issued "c2004.".
- catalog language "eng".
- catalog publisher "Bellingham, Wash., USA : SPIE,".
- catalog subject "Microelectromechanical systems Congresses.".
- catalog subject "Photolithography Congresses.".
- catalog subject "Photomechanical processes Congresses.".
- catalog subject "Photon detectors Design and construction Congresses.".
- catalog subject "TK7875 .D4823 2004".
- catalog title "Device and process technologies for MEMS, microelectronics, and photonics III : 10-12 December 2003, Perth, Australia / Jung-Chih Chiao ... [et al.], chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering ; cosponsored by the University of Western Australia (Australia) [and] Defence Science and Technology (Australia).".
- catalog type "text".