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- catalog contributor b13241245.
- catalog contributor b13241246.
- catalog contributor b13241247.
- catalog contributor b13241248.
- catalog created "c2004.".
- catalog date "2004".
- catalog date "c2004.".
- catalog dateCopyrighted "c2004.".
- catalog description "Includes bibliographical references and indexes.".
- catalog extent "xv, 483 p. :".
- catalog hasFormat "Micro- and nanosystems.".
- catalog identifier "1558997202".
- catalog isFormatOf "Micro- and nanosystems.".
- catalog isPartOf "Materials Research Society symposia proceedings ; v. 782.".
- catalog isPartOf "Materials Research Society symposium proceedings v. 782".
- catalog issued "2004".
- catalog issued "c2004.".
- catalog language "eng".
- catalog publisher "Warrendale, Pa. : Materials Research Society,".
- catalog relation "Micro- and nanosystems.".
- catalog subject "Microelectromechanical systems Congresses.".
- catalog subject "Nanotechnology Congresses.".
- catalog subject "TK7875 .M5 2004".
- catalog title "Micro- and nanosystems : symposium held December 1-3, 2003, Boston, Massachusetts, USA / editors, David A. LaVan ... [et al.].".
- catalog type "Conference proceedings. fast".
- catalog type "text".