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- catalog accrualPolicy "Annual".
- catalog contributor b13271788.
- catalog date "19uu".
- catalog description "Continued by the online version.".
- catalog extent "v.".
- catalog isPartOf "NISTIR".
- catalog issued "19uu".
- catalog language "eng".
- catalog publisher "[Gaithersburg, Md.] : U.S. Dept. of Commerce, Technology Administration, National Institute of Standards and Technology".
- catalog spatial "United States".
- catalog subject "National Institute of Standards and Technology (U.S.). Office of Microelectronics Programs Periodicals.".
- catalog subject "Semiconductor industrial equipment industry Government policy United States Periodicals.".
- catalog subject "Semiconductors Measurement Periodicals.".
- catalog title "Programs, activities, and accomplishments [microform] / Office of Microelectronics Programs.".
- catalog type "text".