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- catalog contributor b13319906.
- catalog contributor b13319907.
- catalog created "c2004.".
- catalog date "2004".
- catalog date "c2004.".
- catalog dateCopyrighted "c2004.".
- catalog description "Includes bibliographical references and index.".
- catalog extent "xx, 283 p. :".
- catalog identifier "1580535909 (alk. paper)".
- catalog isPartOf "Artech House microelectromechanical systems (MEMS) series".
- catalog isPartOf "Microelectromechanical systems series.".
- catalog issued "2004".
- catalog issued "c2004.".
- catalog language "eng".
- catalog publisher "Boston : Artech House,".
- catalog subject "621.381 22".
- catalog subject "Microelectromechanical systems.".
- catalog subject "TK7875 .M35 2004".
- catalog title "Introduction to microelectromechanical systems engineering / Nadim Maluf, Kirt Williams.".
- catalog type "text".