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- 00028173 contributor B17882.
- 00028173 created "c2001.".
- 00028173 date "2001".
- 00028173 date "c2001.".
- 00028173 dateCopyrighted "c2001.".
- 00028173 description "Includes bibliographical references and index.".
- 00028173 extent "xxi, 1001 p. :".
- 00028173 identifier "0815514441".
- 00028173 identifier 00028173.html.
- 00028173 identifier 00028173.html.
- 00028173 issued "2001".
- 00028173 issued "c2001.".
- 00028173 language "eng".
- 00028173 publisher "Norwich, NY : Noyes Publications/William Andrew Pub.,".
- 00028173 subject "621.3815/31 21".
- 00028173 subject "Integrated circuits Very large scale integration.".
- 00028173 subject "Microlithography.".
- 00028173 subject "TK7874 .H3494 2001".
- 00028173 title "Handbook of VLSI microlithography : principles, technology, and applications / edited by John Helbert.".
- 00028173 type "text".