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- 00038824 contributor B30308.
- 00038824 created "c2000.".
- 00038824 date "2000".
- 00038824 date "c2000.".
- 00038824 dateCopyrighted "c2000.".
- 00038824 description "Includes bibliographical references and index.".
- 00038824 extent "xvi, 653 p. :".
- 00038824 identifier "3540667725 (Berlin : alk. paper)".
- 00038824 issued "2000".
- 00038824 issued "c2000.".
- 00038824 language "eng".
- 00038824 publisher "Berlin ; New York : Springer,".
- 00038824 subject "621.044 21".
- 00038824 subject "Electronic circuits.".
- 00038824 subject "Integrated circuits Design and construction.".
- 00038824 subject "Plasma engineering.".
- 00038824 subject "Plasma etching.".
- 00038824 subject "Plasma spraying.".
- 00038824 subject "TA2020 .H35 2000".
- 00038824 title "Handbook of advanced plasma processing techniques / R.J. Shul, S.J. Pearton (eds.).".
- 00038824 type "text".