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- 00057363 contributor B51728.
- 00057363 contributor B51729.
- 00057363 created "c2001.".
- 00057363 date "2001".
- 00057363 date "c2001.".
- 00057363 dateCopyrighted "c2001.".
- 00057363 description "Includes bibliographical references and index.".
- 00057363 extent "x, 295 p. :".
- 00057363 identifier "3540675825 (alk. paper)".
- 00057363 identifier 00057363-d.html.
- 00057363 identifier 00057363-t.html.
- 00057363 isPartOf "Microtechnology and MEMS".
- 00057363 issued "2001".
- 00057363 issued "c2001.".
- 00057363 language "eng".
- 00057363 publisher "Berlin ; New York : Springer,".
- 00057363 subject "681/.2 21".
- 00057363 subject "Detectors Design and construction.".
- 00057363 subject "Microelectromechanical systems Design and construction.".
- 00057363 subject "Micromachining.".
- 00057363 subject "Silicon.".
- 00057363 subject "TK7875 .E49 2001".
- 00057363 subject "Transducers.".
- 00057363 title "Mechanical microsensors / M. Elwenspoek, R.J. Wiergerink.".
- 00057363 type "text".