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- 00067126 contributor B62834.
- 00067126 created "c2001.".
- 00067126 date "2001".
- 00067126 date "c2001.".
- 00067126 dateCopyrighted "c2001.".
- 00067126 description "Includes bibliographical references and index.".
- 00067126 extent "x, 373 p. :".
- 00067126 identifier "0819440450".
- 00067126 issued "2001".
- 00067126 issued "c2001.".
- 00067126 language "eng".
- 00067126 publisher "Bellingham, Wash., USA : SPIE Press,".
- 00067126 subject "621.3815/31 21".
- 00067126 subject "Integrated circuits Design and construction.".
- 00067126 subject "Microlithography.".
- 00067126 subject "TK7874 .L397 2001".
- 00067126 title "Principles of lithography / Harry J. Levinson.".
- 00067126 type "text".