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- 00069552 contributor B65577.
- 00069552 created "c2001.".
- 00069552 date "2001".
- 00069552 date "c2001.".
- 00069552 dateCopyrighted "c2001.".
- 00069552 description "Includes bibliographical references and indexes.".
- 00069552 extent "1 v. (various pagings) :".
- 00069552 identifier "1558994270".
- 00069552 isPartOf "Materials Research Society symposia proceedings ; v. 612.".
- 00069552 isPartOf "Materials Research Society symposium proceedings ; v. 612".
- 00069552 issued "2001".
- 00069552 issued "c2001.".
- 00069552 language "eng".
- 00069552 publisher "Warrendale, Pa. : Materials Research Society,".
- 00069552 subject "621.3815/2 21".
- 00069552 subject "Dielectric films Congresses.".
- 00069552 subject "Integrated circuits Materials Congresses.".
- 00069552 subject "Integrated circuits Reliability Congresses.".
- 00069552 subject "Semiconductors Junctions Congresses.".
- 00069552 subject "Semiconductors Materials Congresses.".
- 00069552 subject "TK7871.85 .M36783 2001".
- 00069552 title "Materials, technology, and reliability for advanced interconnects and low-k dielectrics : symposium held April 23-27, 2000, San Francisco, California, U.S.A / editors, G.S. Oehrlein ... [et al.].".
- 00069552 type "text".