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- 00100975 contributor B67693.
- 00100975 contributor B67694.
- 00100975 contributor B67695.
- 00100975 created "c2000.".
- 00100975 date "2000".
- 00100975 date "c2000.".
- 00100975 dateCopyrighted "c2000.".
- 00100975 description "Includes bibliographical references and index.".
- 00100975 extent "xii, 644 p. :".
- 00100975 identifier "1566772605".
- 00100975 isPartOf "Proceedings (Electrochemical Society) ; v. 99-37.".
- 00100975 isPartOf "Proceedings ; v. 99-37".
- 00100975 issued "2000".
- 00100975 issued "c2000.".
- 00100975 language "eng".
- 00100975 publisher "Pennington, NJ : Electrochemical Society,".
- 00100975 subject "621.381 21".
- 00100975 subject "Chemical mechanical planarization Congresses.".
- 00100975 subject "Grinding and polishing Congresses.".
- 00100975 subject "Metals Pickling Congresses.".
- 00100975 subject "Microelectronics Materials Congresses.".
- 00100975 subject "Semiconductors Surfaces Congresses.".
- 00100975 subject "TK7871 .C46 2000".
- 00100975 title "Chemical mechanical planarization in IC device manufacturing III / proceedings of the international symposium / editors, R.L. Opila ... [et al.].".
- 00100975 type "text".