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- 00103066 contributor B69220.
- 00103066 created "c2000.".
- 00103066 date "2000".
- 00103066 date "c2000.".
- 00103066 dateCopyrighted "c2000.".
- 00103066 description "Includes bibliographical references and indexes.".
- 00103066 extent "ix, 340 p. :".
- 00103066 identifier "1566772540".
- 00103066 isPartOf "Proceedings (Electrochemical Society) ; v. 99-31.".
- 00103066 isPartOf "Proceedings ; 99-31".
- 00103066 issued "2000".
- 00103066 issued "c2000.".
- 00103066 language "eng".
- 00103066 publisher "Pennington, N.J. : Electrochemical Society,".
- 00103066 subject "621.39/5 21".
- 00103066 subject "Copper Congresses.".
- 00103066 subject "Dielectrics Congresses.".
- 00103066 subject "Electric conductivity Congresses.".
- 00103066 subject "Electric contacts Congresses.".
- 00103066 subject "Electrochemical metallizing Congresses.".
- 00103066 subject "Integrated circuits Ultra large scale integration Design and construction Congresses.".
- 00103066 subject "Integrated circuits Ultra large scale integration Materials Congresses.".
- 00103066 subject "Plasma-enhanced chemical vapor deposition Congresses.".
- 00103066 subject "TK7874.76 .I54 2000".
- 00103066 title "Interconnect and contact metallization for ULSI : proceedings of the international symposium / editors, G.S. Mathad, H.S. Rathore, Y. Arita ; [sponsored by] Dielectric Science and Technology, Electronics, and Electrodeposition Divisions.".
- 00103066 type "text".